Hostname: page-component-7bb8b95d7b-dvmhs Total loading time: 0 Render date: 2024-09-13T17:12:11.021Z Has data issue: false hasContentIssue false
  • English
  • Français

High Resolution Auger Depth Profiles Using a Dual Ion Gun System

Published online by Cambridge University Press:  26 February 2011

S. Ingrey  and
J.P.D. Cook
S. Ingrey
Affiliation:
Bell-Northern Research, P.O. Box 3511, Station C, Ottawa, Ontario, Canada, K1Y 4H7.
J.P.D. Cook
Affiliation:
Bell-Northern Research, P.O. Box 3511, Station C, Ottawa, Ontario, Canada, K1Y 4H7.
Get access

Extract

A dual ion gun system has been proposed (D.E. Sykes et al, Appl. Surf. Sci. 5(1980)103) to reduce texturing and improve depth resolution during Auger sputter depth profiling. We have evaluated this ion gun configuration by profiling a variety of multilayer structures. With careful alignment of the guns, we have obtained a dramatic decrease in ion-induced texturing often seen when a single ion gun is used. This effect was particularly pronounced for polycrystalline Al films on Si where an order of magnitude improvement in depth resolution was achieved. Further refinements of the technique include the use of low energy (IkeV) grazing incidence xenon ions and a small electron beam probe area. Depth profiles obtained from Ni/Cr, W/Si, and GaAs/GaAlAs multilayer structures will also be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 54: Symposium E – Thin Films–Interfaces and Phenomena , 1985 , 699
Copyright
Copyright © Materials Research Society 1986

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Hofer, W.O. and Littmark, U., Phys. Lett., 17A (1979) 28 Google Scholar
2. Coburn, J.W., Thin Solid Films, 64(1979)371 Google Scholar
3. Sigmund, P., Phys. Rev. Series 2 184(1969)383 Google Scholar
4. Seah, M.P. and Lea, C., Thin Solid Films, 81(1981)257 Google Scholar
5. Carter, G., Nobes, M.J., Lewis, G.W., Cox, J., Vacuum, 34(1984)263 Google Scholar
6. Sykes, D.E. et al. Appl. Surface Science 5(1980)103 Google Scholar