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High Rate Growth of YBa2Cu3O7-x Thin Films using Pulsed Excimer Laser Deposition

Published online by Cambridge University Press:  16 February 2011

R. E. Muenchausen ,
X. D. Wu ,
S. Foltyn ,
R. C. Estler ,
R. C. Dye ,
A. R. Garcia ,
N. S. Nogar ,
P. England ,
R. Ramesh  and
D. M. Hwang
...Show all authors
R. E. Muenchausen
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, 87545
X. D. Wu
Affiliation:
J. Robert Oppenheimer Fellow
S. Foltyn
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, 87545
R. C. Estler
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, 87545
R. C. Dye
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, 87545
A. R. Garcia
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, 87545
N. S. Nogar
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM, 87545
P. England
Affiliation:
Bellcore, Red Bank, NJ, 07701
R. Ramesh
Affiliation:
Bellcore, Red Bank, NJ, 07701
D. M. Hwang
Affiliation:
Bellcore, Red Bank, NJ, 07701
T. S. Ravi
Affiliation:
Bellcore, Red Bank, NJ, 07701
C. C. Chang
Affiliation:
Bellcore, Red Bank, NJ, 07701
X. X. Xi
Affiliation:
Rutgers University, Piscataway, NJ, 08854
Q. Li
Affiliation:
Rutgers University, Piscataway, NJ, 08854
A. Inam
Affiliation:
Rutgers University, Piscataway, NJ, 08854
T. Venkatesan
Affiliation:
Rutgers University, Piscataway, NJ, 08854
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Abstract

We report here on the pulsed laser deposition of high quality, superconducting, 200 nm thick films of YBa2Cu3O7-x at rates approaching 15 nm/s. Film crystallinity and electrical properties were studied as a function of deposition rate from 0.1 to 14.5 nm/s. Though some degradation in the film crystallinity is observed by RBS channeling and X-ray rocking curve measurements, critical current densities (Jc = 4 × 106 A/cm2, 77 K, B = 0) are effectively unchanged in going to the higher deposition rates.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 191: Symposium N – Laser Ablation for Materials Synthesis , 1990 , 177
Copyright
Copyright © Materials Research Society 1990

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References

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