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High Rate Growth of YBa2Cu3O7-x Thin Films using Pulsed Excimer Laser Deposition

  • R. E. Muenchausen (a1), X. D. Wu (a2), S. Foltyn (a1), R. C. Estler (a1), R. C. Dye (a1), A. R. Garcia (a1), N. S. Nogar (a1), P. England (a3), R. Ramesh (a3), D. M. Hwang (a3), T. S. Ravi (a3), C. C. Chang (a3), X. X. Xi (a4), Q. Li (a4), A. Inam (a4) and T. Venkatesan (a4)...

Abstract

We report here on the pulsed laser deposition of high quality, superconducting, 200 nm thick films of YBa2Cu3O7-x at rates approaching 15 nm/s. Film crystallinity and electrical properties were studied as a function of deposition rate from 0.1 to 14.5 nm/s. Though some degradation in the film crystallinity is observed by RBS channeling and X-ray rocking curve measurements, critical current densities (Jc = 4 × 106 A/cm2, 77 K, B = 0) are effectively unchanged in going to the higher deposition rates.

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High Rate Growth of YBa2Cu3O7-x Thin Films using Pulsed Excimer Laser Deposition

  • R. E. Muenchausen (a1), X. D. Wu (a2), S. Foltyn (a1), R. C. Estler (a1), R. C. Dye (a1), A. R. Garcia (a1), N. S. Nogar (a1), P. England (a3), R. Ramesh (a3), D. M. Hwang (a3), T. S. Ravi (a3), C. C. Chang (a3), X. X. Xi (a4), Q. Li (a4), A. Inam (a4) and T. Venkatesan (a4)...

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