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High Quantum Efficiency AlGaN/GaN Solar-Blind Photodetectors Grown by Metalorganic Chemical Vapor Deposition

Published online by Cambridge University Press:  21 March 2011

U. Chowdhury ,
M. M. Wong ,
C. J. Collins ,
B. Yang ,
T. G. Zhu ,
A. L. Beck ,
J. C. Campbell  and
R. D. Dupuis
U. Chowdhury
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
M. M. Wong
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
C. J. Collins
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
B. Yang
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
T. G. Zhu
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
A. L. Beck
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
J. C. Campbell
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
R. D. Dupuis
Affiliation:
The University of Texas at Austin, Microelectronics Research Center, 10100 Burnet Road, Building 160, Austin, TX 78758 USA Phone: +1-512-471-0537, Fax: +1-512-471-0957, e-mail: dupuis@mail.utexas.edu
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Abstract

We report the growth, fabrication and characterization of back-illuminated AlGaN p-i-n photodetectors operating in the solar-blind wavelength range. A peak external quantum efficiency (EQE) of 45.5% (0.1A/W) was obtained at a wavelength of 270 nm. This EQE was obtained at zero volt bias and without the use of any anti-reflection coating on the back of the substrate. To our knowledge, this is the highest EQE reported to date for p-i-n photodetectors operating in the solar-blind wavelength range.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 693 , 2001 , I12.9.1
Copyright
Copyright © Materials Research Society 2002

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References

[1] Stampfl, C. and Walle, C. Van de, Appl. Phys. Lett. 72, 459 (1998).10.1063/1.120803Google Scholar
[2] Götz, W., private communication.Google Scholar
[3] Tarsa, E. J., Kozodoy, P., Ibbetson, J., Keller, B. P., Parish, G. and Mishra, U., Appl. Phys. Lett. 77, 316 (2000).10.1063/1.126962Google Scholar
[4] Pernot, C., Hirano, A., Iwaya, M., Detchprohm, T., Amano, H. and Akasaki, I., Jpn. J. Appl. Phys. 39, L387 (2000).10.1143/JJAP.39.L387Google Scholar
[5] Brown, J. D., Hi, J., Srinivasan, P., Matthews, J. and Schetzina, J. F., MRS Internet J. Nitride Semicond. Res. 5, 9 (2000).10.1557/S1092578300000090Google Scholar
[6] Lambert, D. J. H., Wong, M. M., Chowdhury, U., Collins, C., Li, T., Kwon, H. K., Shelton, B. S., Zhu, T. G., Campbell, J. C. and Dupuis, R. D., Appl. Phys. Lett. 77, 1900 (2000).10.1063/1.1311821Google Scholar
[7] Li, T., Lambert, D. J. H., Wong, M. M., Collins, C. J., Yang, B., Beck, A. L., Chowdhury, U., Dupuis, R. D. and Campbell, J. C., IEEE J. Quantum Electron. 37, 538 (2001)Google Scholar
[8] Wong, M. M., Chowdhury, U., Collins, C. J., Yang, B., Denyszyn, J. C., Kim, K. S., Campbell, J. C., and Dupuis, R. D., “High Quantum Efficiency AlGaN/GaN Solar-Blind Photodetectors Grown by Metalorganic Chemical Vapor Deposition” Phys. Status Sol., to be published.Google Scholar
[9] Collins, C. J., Li, T., Lambert, D. J. H., Wong, M. M., Dupuis, R. D., and Campbell, J. C., “Selective Regrowth of Al0.30Ga0.70Np-i-n Photodiodes”, submitted for publication.Google Scholar