Skip to main content Accessibility help
×
Home

Harmonic Analysis of AlN Piezoelectric Mesa Structures

  • Madhulika Mazumdar (a1), A. Kabulski (a2), R. Farrell (a3), Sridhar Kuchibhatla (a4), V. R. Pagán (a5) and D Korakakis (a6)...

Abstract

In this work we report the displacement response of piezoelectric Aluminum Nitride (AlN) thin film MESA in an electrical circuit consisting of a circular MESA in series with a resistance subjected to time varying electrical loads. ANSYS was utilized for the simulation of 3D piezoelectric structures; using coupled field analysis to understand the electro-mechanical behavior of AlN thin film mesas. ANSYS applies finite element analysis (FEM) method to simulate the transient piezoelectric trends. Ringing and overshoot effects were observed in the thin simulation results on applying pulse voltages of varying frequencies to the circuit. The fast rise time of the voltage pulse could be exciting these effects. The effect of fast rising pulse voltages on the RC time constant of the circuit is still unclear at this point and needs to be further investigated.

Copyright

References

Hide All
1. Gallas, Q., Wang, G., Papila, M., Sheplak, M., Cattafesta, L., Optimization of synthetic jet actuators, 41st AIAAAerospace SciencesMeeting and Exhibit, Reno, NV, USA, AIAA-2003-0635, (Jan. 2003).
2. Gallas, Q., Holman, R., Nishida, T., Carroll, B., Sheplak, M., Cattafesta, L., AIAA J. 41 (2), 240247 (2003).
3. Morris, C.J., Forster, F.K., Optimization of a circular piezoelectric bimorph for a micropump driver, J. Micromech. Microeng. 10, 459465 (2000).
4. Kim, S., Clark, W.W., Wang, Q.M., Piezoelectric energy harvesting with a clamped circular plate: analysis, J. Intel. Mater. Syst. Str. 16, 847854 (2005).
5. Kim, S., Clark, W.W., Wang, Q.M., Piezoelectric energy harvesting with a clamped circular plate: experimental study, J. Intel. Mater. Syst. Str. 16, 855863 (2005).
6. Horowitz, S., Sheplak, M., Cattafesta, L., Nishida, T., A MEMS acoustic energy harvester, J. Micromech. Microeng. 16 (9), 174181 (2006).
7. Liu, F., Phipps, A., Horowitz, S., Ngo, K., Cattafesta, L., Nishida, T., Sheplak, M., Acoustic energy harvesting using an electromechanical Helmholtz resonator, J. Acoust. Soc. Am. 123 (4), 19831990 (2008).
8. Liu, T., Veidt, M., Kitipornchai, S., Modelling the input–output behaviour of piezoelectric structural health monitoring systems for composite plates, Smart Mater. Struct. 12, 836844 (2003).
9. Cimalla, V, Pezoldt, J and Ambacher, O, J. Phys. D: Appl. Phys. 40 6386-6434 (2007).
10. Mu, Y.H., Hung, N.P., Ngoi, K.A., Int.J.Adv.Manu.tech. 15, 573576 (1999).
11. Sugiyama, S., Uchino, K., Applications of Ferroelectrics, Sixth IEEE Int symp, 637640 (1986).

Keywords

Harmonic Analysis of AlN Piezoelectric Mesa Structures

  • Madhulika Mazumdar (a1), A. Kabulski (a2), R. Farrell (a3), Sridhar Kuchibhatla (a4), V. R. Pagán (a5) and D Korakakis (a6)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed