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Hard High Density Carbon Thin Films for X-Ray Multilayer Optics

Published online by Cambridge University Press:  22 February 2011

Joseph Pedulla ,
Axel Bartos  and
Richard D. Deslattes
Joseph Pedulla
Affiliation:
J. Pedulla & Associates, Columbia, MD 21044
Axel Bartos
Affiliation:
Quantum Metrology Division, National Institute of Standards and Technology, Gaithersburg, MD 20899
Richard D. Deslattes
Affiliation:
Quantum Metrology Division, National Institute of Standards and Technology, Gaithersburg, MD 20899
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Abstract

Dual ion beam assisted deposition (DIBAD) techniques are known to produce high quality diamond-like carbon films. The reported extreme hardness and high thermal conductivity characteristics of these films have stimulated our investigation of their use as one component of multilayer x-ray optical elements. Non-crystalline carbon films were produced and were characterized by means of highly collimated x-ray refiectometry (λ = 0.154 nn), atomic force microscopy, and IR Raman spectroscopy techniques. They exhibit extreme smoothness at the surface and interface, near diamond density, high hardness, and high uniformity over areas of 0.58 x 10-4 m2. Multilayers have been constructed of this non-crystalline carbon interposed with high electron density materials that have exhibited very good x-ray and EUV optical characteristics at λ = 0.154 nm and at λ = 4.0 – 8.0 nm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 349: Symposium T – Novel Forms of Carbon II , 1994 , 541
Copyright
Copyright © Materials Research Society 1994

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