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Growth of Thin Epitaxial CoSi2 Layers on Si(100)

  • S. M. Yalisove (a1), R. T. Tung (a1) and J. L. Batstone (a1)


The growth of high quality, thin (14-70 Å) epitaxial CoSi2 layers on Si(100) substrates have been observed. Three types of films have been grown on the Si(100) substrate; pure CoSi2(100), pure CoSi2(110), and mixed CoSi2(100)+CoSi2(110). The CoSi2(110) can exist in two 90º rotated variants on the Si(100) surface and these are observed. Methods to isolate the epitaxial orientations are described. Results from in-situ LEED and AES as well as ex-situ RBS and plan view TEM are presented.



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1 Rosencher, E., Delage, S., D'Avitaya, F. Arnaud, D'Anterroches, C., Belhaddad, K. and Pfister, J. C., Physica 134 B, 106 (1985).
2 Tung, R. T., Levi, A. F. J. and Gibson, J. M., Appl. Phys. Lett. 48, 635 (1986).
3 Tung, R. T., Phys. Rev. Lett. 52, 461 (1984).
4 Phillips, J. M., Batstone, J. L., Hensel, J. C., and Cerullo, M., Appl. Phys. Lett. 51, 1895 (1987).
5 Tung, R. T. and Batstone, J. L., Appl. Phys. Lett. 52, 648 (1988).
6 Tung, R. T., Batstone, J. L. and Yalisove, S. M., J. Electrochem. Soc., in press (1988).
7 Mattheiss, L. F. and Hamann, D. R., Phys. Rev. B (1988).
8 Bulle-Lieuwma, C. W. T., Ommen, A. H. van, and Hornstra, J., Mat. Res. Soc. Symp. Proc. 102, 377 (1988).
9 Ishizaka, A. ard Shiraki, Y., J. Electrochem. Soc., 133 4, 666 (1986).
10 Tabe, M., Jpn. J. Appl. Phys., 21, 534 (1982)
11 Tung, R. T., Levi, A. F. J. and Gibson, J. M., Appl. Phys. Lett. 48, 635 (1986).
12 Tung, R. T., Gibson, J. M., and Poate, J. M., Phys. Rei. Lett. 50, 429 (1983).
13 Chems, D. and Pond, R. C., Mater. Res. Soc. Symp. Proc., 25, 423 (1984).
14 Pond, R. C., Mat. Res. Symp. Proc. 56, 3 (1986).


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