Skip to main content Accessibility help

Growth of MonX by Reactive Laser ablation

  • Randolph E. Treece (a1), James S. Horwitz (a1), Edward Donovan (a1) and Douglas B. Chrisey (a1)


Control of composition and phase of a series of MoNx thin films has been accomplished by reactive pulsed laser deposition (PLD). Molybdenum foil targets were ablated in a background gas of N2/H2 (10%) at pressures ranging from 40 to 120 mTorr. the MoNx films were deposited simultaneously onto (100) MgO and fused silica substrates. the films were characterized by X-ray diffraction (XRD), temperature-dependent resistivity, and Rutherford backscattering spectroscopy (RBS). the composition, phase, and electronic transport properties were found to depend on N2/H2 pressure, substrate temperature, and substrate orientation. the highest superconducting transition temperature (Tc ) was observed in a hexagonal Mo2N film where Tc (onset) ≈ 8 K. IN general, Tc was observed to correlate most closely with the N/Mo ratio. as the ratio of N/Mo increased above optimal M02N composition, Tc decreased. Films grown on MgO generally had higher N/Mo ratios and hence lower Tc values than films deposited on silic A.



Hide All
1 Growth of electronic ceramics by PLD is reviewed in: Horwitz, J. S., Chrisey, D. B., Grabowski, K. S., and Leuchtner, R. E., Surf. Coatings Technol. 51, 290 (1992).
2 “Pulsed Laser Deposition of Thin Films”, edited by Chrisey, D. B. and Hubler, G. K., (Wiley, New York, 1994).
3 (a) Niu, C. and Lieber, C. M., J. am. Chem. Soc. 114, 3570 (1992). (b) D. P. Norton, B. C. Chakoumakos, J. D. Budai and D. H. Lowndes, Appl. Phys. Lett. 62, 1679 (1993).
4 (a)Ballal, A.K., Salamanca-Riba, L., Doll, G.L., Yaylor, C.A. II, and Clarke, R., Mater. Res. Soc. Proc. 285, 513 (1993). (b) A.K. Ballal, L. Salamanca-Riba, C.A. Yaylor II, and G.L. Doll, Thin Solid Films 224, 46 (1993). (c) and F. Qian, V. Nagabushnam and R.K. Singh, Appl. Phys. Lett. 63, 317 (1993).
5 (a) Xiong, F. and Chang, R.P.H., Mater. Res. Soc. Proc. 285, 587 (1993). (b) C. Niu, Y.Z. Lu, and CM. Lieber, Science 261, 334 (1993).
6 Treece, R.E., Horwitz, J.S., and Chrisey, D.B., Mater. Res. Soc. Proc. 327, 245 (1994).
7 Toth, L.E. in “Transition Metal Carbides and Nitrides”; Margrave, J. L., Ed.; Academic Press: New York, 1971; Refractory Materials Vol. 7.
8 “Superconducting Electronics”, edited by Weinstock, H. and Nisenoff, M., (Springer-Verlag, New York, 1992).
9 Treece, R.E., Horwitz, J.S., and Chrisey, D.B., Chem. Mater. 6, 2205 (1994).
10 Treece, R.E., Horwitz, J.S., Claassen, J.H., Chrisey, D.B., Appl. Phys. Lett. 65, 2860 (1994).
11 Treece, R.E., Horwitz, J.S., and Chrisey, D.B., Mater. Res. Soc. Proc. 343, 747 (1994).
12 Treece, R.E., Osofsky, M., Skelton, E., Qadri, S., Horwitz, J.S., and Chrisey, D.B., Phys. Rev. B. 51, 9356 (1995)
13 Ihara, H., et al, in “Advances in Cryogenic Engineering Materials”, edited by Reed, R.P. and Clark, A.F., vol. 32 (Plenum, New York, 1986) pp. 603616.
14 Fuller, W.W., etal.J. Vac. Sci. Technol. a, 1, 517.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed