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Growth and Structure of in-plane Textured MgO Thin Films Deposited on Amorphous Substrates using ion-beam-assisted E-Beam Evaporation

  • Connie P. Wang (a1), Khiem B. Do (a1), Ann F. Marshall (a2), Theodore H. Geballe (a1), Malcolm R. Beasley (a1) and Robert H. Hammond (a1)...


In-plane aligned MgO thin films (∼100Å) have been obtained on various amorphous substrates by Ar+ ion-assisted electron-beam evaporation. Based on RHEED and cross-section TEM, we have shown that the MgO texture appears at a very early stage of film growth and is optimized at a thickness of around 100Å. Optimal thickness is the stage at which the surface is fully covered by MgO crystallites. The planar-view TEM of grain structure evolution in samples at different stages of growth reveals the dynamics of the texture developing process. Small, (100)-faceted MgO grains were observed both in planar-view and cross-section TEM images.



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1 Harper, J. M. E., Cuomo, J. J., and Kaufman, H. R., J. Vac. Sci. Technol., 21 (3), 737 (1982).
2 Yu, L S., Harper, J. M. E., Cuomo, J. J., and Smith, D. A., Appl. Phys. Lett. 47 (9), 932 (1985).
3 Bradley, R. M., Harper, J. M. E., and Smith, D. A., J. Appl. Phys. 60 (12), 4160 (1986).
4 Lijima, Y., Tanabe, N., Ikeno, Y., Kohno, O., Physics C 185 (3), 1959 (1991).
5 Reade, R. P., Berdahl, P., Russo, R. E., Garrison, S. M., Appl. Phys. Lett. 61 (18), 2231 (1992).
6 Sonnenberg, N., Longo, A. S., Cima, M. J., Chang, B. P., Ressler, K. G., McIntyre, P. C., Liu, Y. P., J. Appl. Phys. 74 (2), 1027 (1993).
7 Wu, X. D., Foltyn, S. R., Arendt, P., Townsend, J., Adams, C., Campbell, I. H., Tiwari, P., Coulter, Y., and Peterson, D. E., Appl. Phys. Lett. 65 (15), 1961 (1994).
8 Zhu, S., Lowndes, D. H.; Budai, J. D., and Norton, D. P., Appl. Phys. Lett. 65(16), 2012 (1994).
9 Do, K. B., presented at the Fall Materials Research Society Conference, Boston, MA, 1995 (unpublished).
10 Wang, C. P., Do, K. B., Beasley, M. R., Geballe, T. H., and Hammond, R. H., Appl. Phys. Lett., Nov. 17, 1997.


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