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Growth and Characterization of Heteroepitaxial Nickel Films on Diamond Substrates

Published online by Cambridge University Press:  25 February 2011

T. P. Humphreys
Affiliation:
Department of Physics, North Carolina State University, Raleigh, North Carolina 276958202.
Hyeongtag Jeon
Affiliation:
Department of Physics, North Carolina State University, Raleigh, North Carolina 276958202.
R. J. Nemanich
Affiliation:
Department of Physics, North Carolina State University, Raleigh, North Carolina 276958202.
J. B. Posthill
Affiliation:
Research Triangle Institute, Research Triangle Park, North Carolina 27709–2194.
R. A. Rudder
Affiliation:
Research Triangle Institute, Research Triangle Park, North Carolina 27709–2194.
D. P. Malta
Affiliation:
Research Triangle Institute, Research Triangle Park, North Carolina 27709–2194.
G. C. Hudson
Affiliation:
Research Triangle Institute, Research Triangle Park, North Carolina 27709–2194.
R. J. Markunas
Affiliation:
Research Triangle Institute, Research Triangle Park, North Carolina 27709–2194.
J. D. Hunn
Affiliation:
Department of Physics and Astronomy, University of North Carolina, Chapel Hill, North Carolina 27599–3255.
N. R. Parikh
Affiliation:
Department of Physics and Astronomy, University of North Carolina, Chapel Hill, North Carolina 27599–3255.
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Abstract

In the present study epitaxial Ni(001) films have been grown on natural C(001) substrates (type la and Ha) and homoepitaxial C(001) films. Two deposition techniques including electron-beam evaporation of Ni in a molecular beam epitaxy (MBE) system and evaporation of Ni from a resistively heated tungsten filament have been employed. As evidenced by scanning electron microscopy (SEM), the Ni films deposited by electron-beam evaporation were found to replicate the very fine, unidirectional scratches present on the as polished C(001) substrates. Indeed, the coverage and uniformity of the deposited films would imply a two-dimensional (2-D) growth mode. In comparison, the thermal evaporation of Ni on C(001) substrates results in a highly textured and faceted surface morphology indicative of three-dimensional (3–D) nucleation and growth. Moreover, Rutherford backscattering/channeling measurements have demonstrated that the Ni(001) films deposited by electron-beam evaporation are of superior crystalline quality. Differences in the observed microstructure and apparent growth modes of the epitaxial Ni(001) films have been attributed to the presence of oxygen incorporation in those layers deposited by thermal evaporation.

Type
Research Article
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

1. Geis, M.W., Efreman, N.N. and Pathman, G.D., J. Vac. Sci. Tecnnol. A 6, 1953 (1988).Google Scholar
2. Belton, D.N. and Schmieg, S.J., J. Appl. Phys. 66, 4223 (1989).Google Scholar
3. Rudder, R.A., Posthill, J.B., Hudson, G.C., Mantini, M.J. and Markunas, R.J., SPIE, 969, 72 (1988).Google Scholar
4. Rudder, R.A., Posthill, J.B., Hudson, G.C., Malta, D., Thomas, R.E., Markunas, R.J., Humphreys, T.P. and Nemanich, R.J.. presented at the 2nd New Diamond Science and Technology Conference ICNDST-2, Washington, DC (1990).Google Scholar
5. Chemical cleaning of diamond using concentrated acids includes the following processing steps: (1) boiling CrO3:H2SO4 for 15 mins, (2) boiling HCl:HNO3 for 15 mins,(3) HF:10H2O for 15 mins, (5) DI rinse and N2 dry.Google Scholar
6. Lurie, P.G. and Wilson, J. M., Surface Science 65, 453 (1977).Google Scholar
7. Paisley, M.J. and Davis, R.F., 1990, private communication of unpublished results, North Carolina State University, Raleigh.Google Scholar
8. Rudder, R.A., Hudson, G.C., Malta, D.P., Posthill, J.B. and Markunas, R.J., (1989), unpublished results.Google Scholar
9. Sandu, G.S., Parikh, N.R. and Swanson, M.L., 1989, private communication of unpublished results, University of North Carolina, Chapel Hill.Google Scholar