We have studied BaxSr1-xTiO3 (BST) thin films (x=0.5) grown on Si (100) with and without a Pt/Ta barrier layer using 90° off-axis RF sputtering. The growth conditions were optimized according to film crystallinity, stoichiometry, and dielectric properties. Polycrystalline BST films with strong (100) texture were obtained via growth on Si (100). The measured dielectric constant from these films was low, presumably because of the parasitic effect of native oxide at BST/Si interface as revealed by TEM. On the other hand, BST films grown on Si with Pt/Ta barrier layers have crystallinity inferior to that on bare Si as determined by X-ray diffraction. Nevertheless, the best BST films on Pt/Ta layers still have good dielectric properties with dielectric constant exceeding 330, leakage current density < 1×10−6 A/cm2 (±1 V), and loss tangent 0.05 at 1 MHz.