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The Graphitization of Amorphous Hydrogenated Carbon Films During Thermal Annealing

  • Sam Shuhan Lin (a1), Shuguang Chen (a2) and Dang Mo (a2)

Abstract

Effects of thermal annealing on the properties of amorphous hydrogenated carbon films have been studied with spectroscopic ellipsometry, electrical conductivity, and infrared and Raman spectroscopy. The results show that not only the optical and electrical properties, but also the infrared and Raman spectra, change significantly after annealing above 400°C. We suggest that thermal annealing makes amorphous hydrogenated carbon films more graphite-like, and the observed changes in the microstructure cause the changes in the optical and electrical properties.

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The Graphitization of Amorphous Hydrogenated Carbon Films During Thermal Annealing

  • Sam Shuhan Lin (a1), Shuguang Chen (a2) and Dang Mo (a2)

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