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The Graphitization of Amorphous Hydrogenated Carbon Films During Thermal Annealing

Published online by Cambridge University Press:  21 February 2011

Sam Shuhan Lin ,
Shuguang Chen  and
Dang Mo
Sam Shuhan Lin
Affiliation:
University of Missouri-St. Louis, Department of Physics, St. Louis, MO 63121
Shuguang Chen
Affiliation:
Zhongshan University, Department of Physics, Guangzhou, People's Repulic of China
Dang Mo
Affiliation:
Zhongshan University, Department of Physics, Guangzhou, People's Repulic of China
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Abstract

Effects of thermal annealing on the properties of amorphous hydrogenated carbon films have been studied with spectroscopic ellipsometry, electrical conductivity, and infrared and Raman spectroscopy. The results show that not only the optical and electrical properties, but also the infrared and Raman spectra, change significantly after annealing above 400°C. We suggest that thermal annealing makes amorphous hydrogenated carbon films more graphite-like, and the observed changes in the microstructure cause the changes in the optical and electrical properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 164: Symposium H – Materials Issues in Microcrystalline Semiconductors , 1989 , 75
Copyright
Copyright © Materials Research Society 1990

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