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Grain Orientation Mapping of Passivated Aluminum Interconnect Lines with X-ray Micro-Diffraction

  • A. A. MacDowell (a1), C. H. Chang (a1) (a2), H. A. Padmore (a1), J. R. Patel (a1) (a2) and A. C. Thompson (a3)...


A micro x-ray diffraction facility is under development at the Advanced Light Source. Spot sizes are typically about 1-μm size generated by means of grazing incidence Kirkpatrick-Baez focusing mirrors. Photon energy is either white of energy range 6-14 keV or monochromatic generated from a pair of channel cut crystals. A Laue diffraction pattern from a single grain in a passivated 2-μm wide bamboo structured Aluminum interconnect line has been recorded. Acquisition times are of the order of a few seconds. The Laue pattern has allowed the determination of the crystallographic orientation of individual grains along the line length. The experimental and analysis procedures used are described, as is a grain orientation result. The future direction of this program is discussed in the context of strain measurements in the area of electromigration.



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1. Marieb, T., Flinn, P., Bravman, J. C., Gardner, D., and et al. J. App Phys. 78, 10261032 (1995).
2. Wang, P. C., Cargill, G. S., Noyan, I. C., Liniger, E. G., Hu, C. K. and Lee, K. Y., MRS Proceedings 473, 273278 (1997).
3. Chung, J. S., Ice, G. E., These proceedings.
4. Rindby, A., Engstrom, P. and Janssens, K., J.Synchrotron Rad. 4, 228235 (1997)
5. MacDowell, A. A., Celestre, R., Chang, C. H., Franck, K., Howells, M. R., Locklin, S., Padmore, H. A., Patel, J. R., and Sandler, R., SPIE Proceedings 3152, 126135 (1998).
6. Soyer, A., J. App. Cryst. 29, 509 (1996);
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  • EISSN: 1946-4274
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