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Grain Orientation Mapping of Passivated Aluminum Interconnect Lines with X-ray Micro-Diffraction

  • A. A. MacDowell (a1), C. H. Chang (a1) (a2), H. A. Padmore (a1), J. R. Patel (a1) (a2) and A. C. Thompson (a3)...

Abstract

A micro x-ray diffraction facility is under development at the Advanced Light Source. Spot sizes are typically about 1-μm size generated by means of grazing incidence Kirkpatrick-Baez focusing mirrors. Photon energy is either white of energy range 6-14 keV or monochromatic generated from a pair of channel cut crystals. A Laue diffraction pattern from a single grain in a passivated 2-μm wide bamboo structured Aluminum interconnect line has been recorded. Acquisition times are of the order of a few seconds. The Laue pattern has allowed the determination of the crystallographic orientation of individual grains along the line length. The experimental and analysis procedures used are described, as is a grain orientation result. The future direction of this program is discussed in the context of strain measurements in the area of electromigration.

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  • EISSN: 1946-4274
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