Hostname: page-component-7479d7b7d-k7p5g Total loading time: 0 Render date: 2024-07-11T08:39:28.574Z Has data issue: false hasContentIssue false
  • English
  • Français

Gold Overcoatings on Spindt-Type Field Emitter Arrays

Published online by Cambridge University Press:  10 February 2011

S. L. Skala ,
D. A. Ohlberg ,
A. A. Talin  and
T. E. Felter
S. L. Skala
Affiliation:
Coloray Display Corporation Fremont, CA 94539
D. A. Ohlberg
Affiliation:
Sandia National Laboratories, Livermore, CA 94551
A. A. Talin
Affiliation:
Sandia National Laboratories, Livermore, CA 94551
T. E. Felter
Affiliation:
Sandia National Laboratories, Livermore, CA 94551
Get access

Abstract

The electron emission properties of a Spindt-type field emitter array have been measured before and after deposition of approximately 100 Å of gold. The workfunction of the emitter decreased by 5% after gold deposition resulting in an 11% reduction in turn-on voltage. Emission stability as measured by RMS current noise improved by 40%. Improvements in emission do not withstand exposure to air. However, baking at moderate temperatures (200°C) restores the emission improvements obtained with the gold overcoating. Fowler-Nordheim plots show that the enhanced emission after baking is due to a increase of the Fowler-Nordheim intercept and not a decrease in slope. Additionally, the gold over coatings resist poisoning as a 50,000 L dose of oxygen only slightly affects emission.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 424: Symposium H – Flat Panel Display Materials II , 1996 , 387
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Macaulay, j. M., Brodie, I., Spindt, C. A. and Holland, C. E., Appl. Phys. Lett. 61, 997 1992.Google Scholar
2. Swanson, L. W. and Martin, N. A., J. Appl. Phys. 46, 2029 1975.Google Scholar
3. Schwoebel, P. R. and Spindt, C. A., J. Vac. Sci. Technol. B12, 2414 1994.Google Scholar
4. Ishikawa, j., et al J. Vac. Sci. Technol. B11, 403 1993.Google Scholar
5. Spindt, C. A., Brodie, I., Humphrey, L. and Westerberg, E. R., J. Appl. Phys. 47, 5248 (1976).Google Scholar
6. Schwoebel, P. R., Spindt, C. A. and Brodie, I., J. Vac. Sci. Technol. B13, 338, (1995).Google Scholar