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Generation and Suppression of Stacking Faults in Gap Layers Grown on Si(100) Substrates by Molecular Beam Epitaxy and Migration Enhanced Epitaxy

  • Y. Takagi (a1), H. Yonezu (a1), K. Samonji (a1), T. Tsuji (a1) and N. Ohshima (a1)...

Abstract

We have investigated the generation process of crystalline defects in GaP layers grown on Si substrates (GaP/Si) by molecular beam epitaxy (MBE) and migration enhanced epitaxy (MEE). Transmission electron microscopy observations revealed that a regular network of misfit dislocations was generated in GaP/Si by MEE. On the other hand, threading dislocations as well as interfacial misfit dislocations were observed in GaP/Si by MBE. Moreover, stacking faults were generated in high density at the hetero-interface of GaP/Si by MBE. The density of stacking faults was drastically reduced by MEE.

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1. Hayashi, I., Jpn. J. Appl. Phys. 32, 266 (1993).
2. Takagi, Y., Yonezu, H, Kawai, T., Hayashida, K., Samonji, K., Ohshima, N. and Pak, K., J. Cryst. Growth 150, 677 (1995).
3. Samonji, K., Yonezu, H., Takagi, Y., Iwaki, K., Ohshima, N., Shin, J. K. and Pak, K., Appl. Phys. Lett. 69, 100 (1996).
4. Ishizaka, A. and Shiraki, Y., J. Electrochem. Soc. 133, 666 (1986).
5. Chang, K. H., Gibala, R., Srolovitz, D., Bhattacharya, P. K. and Mansfield, J.F., J. Appl. Phys. 67, 4093 (1990).
6. Kawai, T., Yonezu, H., Saito, D., Yokozeki, M. and Pak, K., Jpn. J. Appl. Phys. 33, L1740 (1994).
7. Bozso, F. and Avouris, Ph., Phys. Rev. B 43, 1847 (1991).
8. Kuo, L. H., Salamance-Riba, L., Wu, B. J., Haugen, G. M., DePuydt, J. M., Hofler, G. and Cheng, H., J. Vac. Sci. Technol. B 13, 1694 (1995).

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Generation and Suppression of Stacking Faults in Gap Layers Grown on Si(100) Substrates by Molecular Beam Epitaxy and Migration Enhanced Epitaxy

  • Y. Takagi (a1), H. Yonezu (a1), K. Samonji (a1), T. Tsuji (a1) and N. Ohshima (a1)...

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