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Gate Overlapped Lightly Doped Drain Poly-Si TFTs Employing 45° Tilt Implant For Source and Drain

  • Jae-Hoon Lee (a1), Moon-Young Shin (a1), Heesun Shin (a1), Woo-Jin Nam (a1) and Min-Koo Han (a1)...


We propose a short channel gate overlapped lightly doped drain (GOLDD) poly-Si TFT employing 45° tilt implant for source and drain (S/D) regions without any additional ion doping or mask. Oblique-incident ELA activation is performed to activate both n+ S/D and n- LDD regions as well as cure junction defects. The proposed poly-Si TFT can suppress the anomalous leakage current, and exhibit the better reliability against the hot-carrier stress.



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[1] Song, I.H., IEEE Electron Device Letters, vol. 24 Issue: 9, pp. 580582, Sept. 2003
[2] Akimoto, H., Proceeding Society for information display, 1998, pp. 891894.
[3] Fossum, J.G., IEEE Trans.Electron Devices, vol.ED–32, pp.18781884, Sept.1985
[4] Madan, S.K., IEEE Trans.Electron Devices, vol.ED–33, pp.15181528, Oct.1986
[5] Hatano, M., IEEE International Electron Device Meeting, 1997, pp. 523525.
[6] Ohgata, K., IEEE International Electron Device Meeting, 2000, pp. 205208.
[7] Park, K.C., IEEE International Electron Device Meeting, 2002, pp. 573576.
[8] Moller, K.D., OPTICS, (University Science Books, Mill Valley, CA, 1988) p. 172.
[9] Ayres, J.R., Jpn. J. Appl. Phys. Vol. 37, pp. 18011808, 1998
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