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Gas Phase and Gas Surface Kinetics of Transient Silicoin Hydride Species

  • Joseph M. Jasinski (a1)

Abstract

This paper presents a summary of the current state of our understanding of the absolute reactivity of transient silicon hydride species, such as SiH, SiH2 and SiH3 in the gas phase and at the surface of thin films.

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1. Jasinski, J. M. and Gates, S. M., Acc. Chem. Res. 24, 9 (1991).
2. Begemann, M. H., Dreyfus, R. W. and Jasinski, J. M., Chem. Phys. Lett. 155, 351 (1989).
3. Nemoto, M., Suzuki, A., Nakamura, H., Shibuya, K. and Obi, K., Chem. Phys. Lett. 162, 467 (1989).
4. Schmitt, J. P. M., Gressier, P., Krishnan, M., DeRosny, G. and Perrin, J., Chem. Phys. 84, 281 (1984).
5. Inoue, G. and Suzuki, M., Chem. Phys. Lett. 122, 361 (1985).
6. Jasinski, J. M. and Chu, J. O., J. Chem. Phys. 88, 1678 (1988).
7. Jasinski, J. M., J. Phys. Chem. 90, 555 (1986).
8. Baggott, J. E., Frey, H. M., King, K. D., Lightfoot, P. D., R. Walsh and Watts, I. M., J. Phys. Chem. 92, 4025 (1988).
9. Baggott, J. E., Frey, H. M., Lightfoot, P. D., Walsh, R. and Watts, I. M., J. Chem. Soc. Faraday Trans. 86, 27 (1990).
10. Dietrich, T. R., Chiussi, S., Marek, M., Roth, A. and Comes, F. J., J. Phys. Chem. 95, 9302 (1991).
11. Chu, J. O., Beach, D. B. and Jasinski, J. M., J. Phys. Chem. 91, 5340 (1987).
12. Chu, J. O., Beach, D. B., Estes, R. D. and Jasinski, J. M., Chem. Phys. Lett. 143, 135 (1988).
13. Becerra, R., Frey, H. M., Mason, B. P. and Walsh, R., Chem. Phys. Lett 185, 415 (1991).
14. Loh, S. K., Beach, D. B. and Jasinski, J. M., Chem. Phys. Lett. 169, 55 (1990).
15. Itabashi, N., Kato, K., Nishiwaki, N., Goto, T., Yamada, C. and Hirota, E., Jpn. J. Appl. Phys. 28, L325 (1989).
16. Loh, S. K. and Jasinski, J. M., J. Chem. Phys. 95, 4914 (1991).
17. Koshi, M., Miyoshi, A. and Matsui, H., Chem. Phys. Lett. 184, 442 (1991).
18. Chasovnikov, S. A. and Krasnoperov, L. N., Khim. Fiz. 6, 956 (1987).
19. Slagle, J. R., Bernhardt, J. R. and Gutman, D., Chem. Phys. Lett. 149, 180 (1988).
20. Sugawara, K., Nakanaga, T., Takeo, H. and Matsumura, C., Chem. Phys. Lett. 157, 309 (1989).
21. Krasnoperov, L. N., Chesnokov, E. N. and Panfilov, V. N., Chem. Phys. 89, 297 (1984).
22. Seetula, J. A., Feng, Y., Gutman, D., Seakins, P. W. and Pilling, M. J., J. Phlys. Chem. 95, 1658 (1991).
23. AI-Rubaiey, N., Frey, H. M., Mason, B. P., McMahon, C. and Walsh, R., Chem. Phys. Lett. 204, 301 (1993).
24. Becerra, R., Frey, H. M., Mason, B. P., Walsh, R. and Gordon, M. S., J. Am. Chem. Soc. 114, 2751 (1992).
25. Quandt, R. W. and Hershberger, J. F., Chem. Phys. Lett. 206, 355 (1993).
26. Chu, J. O. and Jasinski, J. M., unpublished.
27. Robertson, R. and Gallagher, A., J. Appl. Phys. 59, 3402 (1986).
28. Ruscic, B. and Berkowitz, J., J. Chem. Phys. 95, 2416 (1991).
29. Curtis, L., Raghavachari, K., Deutsch, P. W. and Pople, J. A., J. Chem. Phys. 95, 2433 (1991).
30. Bogey, M., Bolvin, H., Demuynck, C. and Destombes, J. L., Phys. Rev. Lett. 66, 413 (1991).
31. Cordonnier, M., Bogey, M., Demuynck, C. and Destombes, J. L., J. Chem. Phys. 97, 7984 (1992).
32. Grev, R. S. and Schaefer, H. F., J. Chem. Phys., 97, 7990 (1992).
33. Jasinski, J. M., Chem. Phys. Lett. 183, 558 (1991).
34. Perner, D. and Volz, A., Z. Naturforsch. 29a, 976 (1974).
35. Jasinski, J. M. and LeGoues, F. K., Chem. Mater. 3, 989 (1991).
36. Ho, P., Breiland, W. G. and Buss, R. J., J. Chem. Phys. 91, 2627 (1989).
37. Robertson, R. M. and Rossi, M., Appl. Phys. Lett. 54, 185 (1989).
38. Robertson, R. M. and Rossi, M., J. Chem. Phys. 91, 5037 (1989).
39. Jasinski, J. M., J. Phys. Chem. 97, 7385 (1993).
40. Krasnoperov, L. N., Nosov, V. V., Baklanov, A. V. and Panfilov, V. N., Khim. Fiz. 7, 528 (1988).
41. Krasnoperov, L. N., personal communication, 1993.
42. Matsuda, A., Nomoto, K., Takeuchi, Y., Suzuki, A., Yuuki, A. and Perrin, J., Surf Sci. 227, 50 (1990).
43. Doughty, D. A., Doyle, J. R., Lin, G. H. and Gallagher, A., J. Appl. Phys. 67, 6220 (1990).

Gas Phase and Gas Surface Kinetics of Transient Silicoin Hydride Species

  • Joseph M. Jasinski (a1)

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