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Gallium zinc oxide coated polymeric substrates for optoelectronic applications

  • E. Fortunato (a1), A. Gonçalves (a1), A. Marques (a1), V. Assunção (a1), I. Ferreira (a1), H. Águas (a1), L. Pereira (a1) and R. Martins (a1)...

Abstract

Highly transparent and conductive ZnO:Ga thin films were produced by rf magnetron sputtering at room temperature on polyethylene naphthalate substrates. The films present a good electrical and optical stability, surface uniformity and a very good adhesion to the polymeric substrates. The lowest resistivity obtained was 5×10-4 Ωcm with a sheet resistance of 15 Ω/sqr and an average optical transmittance in the visible part of the spectra of 80 %. It was also shown that by passivating the polymeric surface with a thin SiO2 layer, the electrical and structural properties of the films are improved nearly by a factor of 2.

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