Skip to main content Accessibility help

GaAs(100) Surface Modifications at Elevated Temperatures, Studied By In-Situ Spectroscopic Ellipsometry

  • Huade Yao (a1), Paul G Snyder (a1) and John A Woollam (a1)


Spectroscopic ellipsometric (SE) measurements of GaAs (100) were carried out in an ultrahigh vacuum (UHV) chamber, without arsenic overpressure, at temperatures ranging from room temperature (RT) to ∼610°C. Surface changes induced at elevated temperatures were monitored by in-situ spectroscopic ellipsometry. The SE data clearly displayed in real time the process of desorption of the GaAs-surface-oxide overlayer at ∼580°C. In addition, changes in the near-surface region were observed before and after the oxide desorption. The near-subsurface region (top 50–100 Å) became less optically dense after being heated to 540°C or higher. For comparison, a pre-arsenic-capped molecular-beam-epitaxy (MBE)-grown GaAs surface was also studied. After the arsenic cap was evaporated off at ∼350°C, this surface remained smooth and clean as it was heated to higher temperatures.



Hide All
1. Azzam, R.M.A. and Bashara, N.M., Ellipsometry and Polarized Light, (North-Holland, Amsterdam, 1977).
2. Aspnes, D.E., in Handbook of Optical Constants of Solids ed. Palik, E.D., (Academic Press, New York, 1985) p89.
3. Yao, H.D., Snyder, P.G., and Woollam, J.A., (to be published).
4. Aspnes, D.E. and Studna, A.A., Phys. Rev. B 27, 985 (1983).
5. Yao, H.D., Snyder, P.G. and Woollam, J.A., Proceedings of ICEM-2 (in press).
6. Snyder, P.G., Rost, M.C., Bu-Abbud, G.H., Woollam, J.A. and Alterovitz, S.A., J. Appl. Phys. 60, 3293 (1986).
7. Studna, A.A., Aspnes, D.E., Florez, L.T., Wilkens, B.J., Harbison, J.P., and Ryan, R.E., J. Vac. Sci. Technol. A7, 3291 (1989).
8. Aspnes, D.E. and Studna, A.A., Appl. Phys. Lett. 39, 316 (1981).
9. Aspnes, D.E. and Theeten, J.B., Phys. Rev. B 20, 3292 (1979).
10. Foxon, C.T., Harvey, J.A. and Joyce, B.A., J. Phys. Chem. Solids 34, 1693 (1973).
11. Aspnes, D.E., in Handbook of Optical Constants of Solids ed. Palik, E.D., (Academic Press, New York, 1985) p 89.
12. Aspnes, D.E., Quinn, W.E., and Gregory, S., Appl. Phys. Lett. 56, 2569 (1990).
13. Aspnes, D.E., Schwartz, G.P., Gualtieri, G.J., Studna, A.A., and Schwartz, B., J. Electrochem. Soc. 128, 590 (1981).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed