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Formation of Au-nanocrystals in TiO2 and SrTiO3 by ion implantation in restricted volumes

Published online by Cambridge University Press:  01 February 2011

R. Fromknecht ,
G. Linker ,
K. Sun ,
S. Zhu ,
L.M. Wang ,
A. van Veen ,
M.A. van Huis ,
T. Weimann ,
J. Wang  and
J. Niemeyer
...Show all authors
R. Fromknecht
Affiliation:
Forschungszentrum Karlsruhe, Institut für Festkörperphysik, Germany
G. Linker
Affiliation:
Forschungszentrum Karlsruhe, Institut für Festkörperphysik, Germany
K. Sun
Affiliation:
The University of Michigan, Dept. of Nucl. Eng. and Rad. Science, USA
S. Zhu
Affiliation:
The University of Michigan, Dept. of Nucl. Eng. and Rad. Science, USA
L.M. Wang
Affiliation:
The University of Michigan, Dept. of Nucl. Eng. and Rad. Science, USA
A. van Veen
Affiliation:
Interfaculty Reactor Institute, Delft University of Technology, The Netherlands
M.A. van Huis
Affiliation:
Interfaculty Reactor Institute, Delft University of Technology, The Netherlands
T. Weimann
Affiliation:
Physikalisch-Technische Bundesanstalt Braunschweig, Germany
J. Wang
Affiliation:
Physikalisch-Technische Bundesanstalt Braunschweig, Germany
J. Niemeyer
Affiliation:
Physikalisch-Technische Bundesanstalt Braunschweig, Germany
F. Eichhorn
Affiliation:
Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung, Dresden, Germany
T. Wang
Affiliation:
Forschungszentrum Rossendorf, Institut für Ionenstrahlphysik und Materialforschung, Dresden, Germany
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Abstract

Au-ions were implanted at RT conventionally and through a mask into TiO2- and SrTiO3-single crystals with doses in the range from 1×1015Au+/cm2 to 1×1017Au+/cm2, and dose rates of ∼1011ions/sec and ∼3×1013ions/sec, at an energy of 260keV; some samples subsequently were annealed at temperatures up to 1100K. The Au-atoms precipitated to nanocrystals during implantation with an average particle size of 1.5nm. HRTEM investigations revealed that the Au-nanocrystals, embedded in amorphous TiO2-regions, have a broad size distribution varying from large sizes in the near surface region to smaller sizes at larger depths. In the annealing process a coarsening and a reorientation of the Au-nanocrystals is observed. At 1000K the particle size of the textured Au-implant was evaluated to be ∼6nm. Implantation with a high dose rate performed through a metal mask with holes of 120μm diameter and without annealing resulted in an almost equidistant arrangement of the Au-nanocrystals with a narrow size distribution of 2–6nm in TiO2 and 3–5nm in SrTiO3 in the near surface region. Au-ion implantation through an e-beam resist mask (50nm × 50nm holes), with doses ranging from 1×1015Au+/cm2 to 4×1015Au+/cm2 at the low dose rate and annealed at 1000K, lead to a periodic structure of the Au-nanocrystals. The nanocrystal size, evaluated from TEM analysis, in the as-implanted state was ∼5nm and after annealing at 1000K sizes of several nanometers to several tens of nanometers were observed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 792: Symposium R – Radiation Effects and Ion Beam Processing of Materials , 2003 , R8.3
Copyright
Copyright © Materials Research Society 2004

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References

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