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Formation, evolution and degradation of nanostructured covalent thin films deposited by Low Energy Cluster Beam Deposition

  • Giuseppe Compagnini (a1), Luisa D'Urso (a2), A. Alessandro Scalisi (a3), Corinna Altamore (a4) and Orazio Puglisi (a5)...

Abstract

Low Energy Cluster Beam Deposition (LECBD) is considered an intriguing technique to obtain thin layers with well defined structures at the nano- and meso-scale levels, allowing novel optical, electronic and magnetic properties. The produced layers are highly porous and extremely reactive due to the high surface to volume ratio and must be characterized with “in situ” techniques in order to study their original composition and their evolution once exposed to reactive gases. In this work we present a general overview and some results on the formation evolution and deposition of silicon and carbon cluster beams produced using a laser vaporization source.

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Formation, evolution and degradation of nanostructured covalent thin films deposited by Low Energy Cluster Beam Deposition

  • Giuseppe Compagnini (a1), Luisa D'Urso (a2), A. Alessandro Scalisi (a3), Corinna Altamore (a4) and Orazio Puglisi (a5)...

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