Skip to main content Accessibility help
×
Home

Flash-Lamp-Induced Lateral Solidification of Thin Si Films

  • K. Omori (a1) (a2), G.S. Ganot (a1), U.J. Chung (a1), A.M. Chitu (a1), A.B. Limanov (a1) and James S. Im (a1) (a3)...

Abstract

In this paper we show that a flash lamp can be employed to induce controlled lateral solidification of a-Si thin films. Specifically, a dual xenon-arc-lamp-based system was utilized to induce location-controlled complete melting by shaping the incident beam using a contact mask. The resulting laterally solidified microstructure consisted of exceptionally long grains (~10s to ~100s of μm) that were relatively free of intragrain-defects. With further development and optimization, the approach may lead to cost-effective/high-throughput processes and systems that can capture and enhance the advantages of laser-based/melt-mediated crystallization techniques.

Copyright

References

Hide All
1. Bomke, H.A., Berkowitz, H.L., Harmatz, M., Kronenberg, S., Lux, R., Appl. Phys. Lett. 33, 955 (1978).10.1063/1.90232
2. Correra, L. and Pedulli, L., Appl. Phys. Lett. 37, 55 (1980).10.1063/1.91846
3. Wirth, H., Panknin, D., Skorupa, W., Niemann, E., Appl. Phys. Lett. 74, 979 (1999).
4. Pécz, B., Dobos, L., Panknin, D., Skorupa, W., Lioutas, C., Vouroutzis, N., Appl. Surf. Sci. 242, 185 (2005).10.1016/j.apsusc.2004.08.015
5. Terai, F., Matunaka, S., Tauchi, A., Ichimura, C., Nagatomo, T., Homma, T., J. Electrochem. Soc. 153, H147 (2006).10.1149/1.2200291
6. Im, James S., Chahal, M., van der Wilt, P.C., Chung, U.J., Ganot, G.S., Chitu, A.M., Kobayashi, N., Omori, K., Limanov, A.B., J. Cryst. Growth 312, 2775 (2010).10.1016/j.jcrysgro.2010.05.037
7. Gebel, T., Voelskow, M., Skorupa, W., Mannino, G., Privitera, V., Priolo, F., Napolitani, E., Carnera, A., Nucl. Instrum. Methods Phys. Res., Sect. B 186, 287 (2002).10.1016/S0168-583X(01)00900-4
8. Kim, H.J. and Im, James S., Appl. Phys. Lett. 64, 2303 (1994).
9. Im, James S., Crowder, M.A., Sposili, R.S., Leonard, J.P., Kim, H.J., Yoon, J.H., Gupta, V.V., Jin Song, H., Cho, H.S., Phys. Stat. Sol. (a) 166, 603 (1998).10.1002/(SICI)1521-396X(199804)166:2<603::AID-PSSA603>3.0.CO;2-0
10. Hawkins, W.G. and Biegelsen, D.K., Appl. Phys. Lett. 42, 358 (1983).10.1063/1.93939

Keywords

Flash-Lamp-Induced Lateral Solidification of Thin Si Films

  • K. Omori (a1) (a2), G.S. Ganot (a1), U.J. Chung (a1), A.M. Chitu (a1), A.B. Limanov (a1) and James S. Im (a1) (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed