Skip to main content Accessibility help
×
Home

Fe-Silicides Formed with Molecular Beam Epitaxy and Studied with Conversion Electron Mössbauer Spectroscopy

  • S. Degroote (a1), M.H. Langelaar (a1) (a2), T. Kobayashi (a1), J. Dekoster (a1), J. De Wachter (a1), R. Moons (a1), L. Niesen (a2) and G. Langouche (a1)...

Abstract

Fe-sulicides were formed by annealing MBE-deposited thin 57Fe layers with thicknesses between 20 Å and 60 Å on (7x7) reconstructed Si(111) substrates. During the growth the substrate was held at room temperature. The silicide formation upon annealing in the temperature range of 200°C to 900°C was studied in-situ with RH-EED. Samples were studied with in-situ CEMS (Conversion Electron Mossbauer Spectroscopy) as well as with ex-situ CEMS after covering with Ag to prevent oxidation. RBS/Channeling was used to study the epitaxial quality and the structure of these layers.

Using the 57Fe nuclear probe, it is shown that silicide formation occurs at the interface already at room temperature. Metastable silicides with cubic structure are observed in the low temperature annealing range, and characterized by their Mossbauer parameters. At higher temperatures stable ε-FeSi and β-FeSi2 are formed.

Copyright

References

Hide All
1. Hansen, Max, Constitution of binary alloys, (McGraw-Hill book Company 1958).
2. Onda, N., Henz, J., Muller, E., Mader, K.A. and Kanel, H. Von, AppI. Surface Sci. 56–58, 421 (1992).
3. Derrien, J., Chevrier, J., Vinh, Le Thanh, Berbezier, I., Lagomarsino, S. and Grimaldi, M.G., RMS93.
4. Mäder, K.A., Kanel, H. Von and Baldereschi, A., Phys. Rev. B 48(7), 4364 (1993).
5. Kobayashi, T., Dekoster, J., Degroote, S., Langelaar, M.H., Niesen, L. and Langouche, G., proceedings conference in Julich (1993).
6. Degroote, S., Langelaar, M.H., Kobayashi, T., Dekoster, J., Wachter, J. De, Moons, R., Niesen, L. and Langouche, G., to be published.
7. Doolittle, L.R., Nucl. Instr. Meth. B9, 344 (1985).
8. Derrien, J., Ghevrier, J., Younsi, A., Thanh, V. Le, Dussaulcy, J.P. and Cherief, N., Phys. Scr. T35, 251 (1991).
9. Wallart, X., Zeng, H.S., Nys, J.P. and Dalmai, G., AppI. Surface. Sci. 56/58, 427433 (1992).
10. Kanel, H. Von, Onda, N., Sirringhaus, H., Mèiller, E., Goncalves-Gonto, S. and Schwarz, C., (preprint)
11. Alvarez, J., Parga, A.L. Vdzquez de, Hinarejos, J.J., Figuera, J. de la, Michel, E.G., Ocal, C. and Miranda, R., J. Vac. Sci. Technol. A 11 (4), 929 (1993).
12. Helgason, Örn and Sigffisson, T.I., Hyp. Int. 45, 415418 (1989).
13. Derrien, J., Ghevrier, J., Thanh, V. Le and Manhan, J.E., Appl. Surface Sci. 56–58, 382393 (1992).

Fe-Silicides Formed with Molecular Beam Epitaxy and Studied with Conversion Electron Mössbauer Spectroscopy

  • S. Degroote (a1), M.H. Langelaar (a1) (a2), T. Kobayashi (a1), J. Dekoster (a1), J. De Wachter (a1), R. Moons (a1), L. Niesen (a2) and G. Langouche (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed