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Factors Affecting Spatial Resolution for Compositional Analysis in Stem

  • John B. Vander Sande (a1) and Anthony J. Garratt-Reed (a1)


This paper discusses the application of the scanning transmission electron microscope (STEM) to the detection of segregation at interfaces via the monitoring of X-rays generated when the incident electrons interact with the segregant. Issues of spatial resolution and minimum detectable concentration are discussed. Specific examples, emphasizing the importance of probe size, sample thickness, and sample orientation, are presented.



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Factors Affecting Spatial Resolution for Compositional Analysis in Stem

  • John B. Vander Sande (a1) and Anthony J. Garratt-Reed (a1)


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