Inclined substrate deposition (ISD) offers the potential for rapid production of high-quality biaxially textured buffer layers suitable for YBCO-coated conductors. We have grown biaxially textured MgO films by ISD at deposition rates of 20–100 Å/sec. Columnar grain structures with a roof-tile-shaped surface were observed in the ISD-MgO films. X-ray pole figure analysis revealed that the (002) planes of the ISD-MgO films are titled at an angle from the substrate normal. A small phi-scan full-width at half maximum (FWHM) of ≈9° was observed on MgO films deposited at an inclination angle of 55°. YBCO films were also grown on ISD-MgO-buffered Hastelloy C276 substrates by pulsed laser deposition. We obtained a critical current density of ≈2 × 105 A/cm2 at 77 K in self-field on 0.5-μm-thick, 0.5-cm-wide, 1-cm-long samples. This work has demonstrated that biaxially textured ISD MgO buffer layers deposited on metal substrates are promising candidates for fabrication of high-quality YBCO-coated conductors.