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Extended Damage Depth Determinations in AR- and H-Implanted Silica Glass

  • G.W. Arnold (a1), G. Battaglin (a2) and P. Mazzoldi (a3)


Damage depths for Ar-implanted fused silica have been examined by Rutherford backscattering (RBS) and elastic recoil detection (ERD) ion-beam analysis. H incursion (6 at. %) from ambient atmospheres to twice TRIM values was found for damage depths which intersected the surface. H implants were used to decorate Ar damage for deeper Ar implants. The incursion of H for high-fluence implants is important for optoelectronic applications.



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