Skip to main content Accessibility help
×
Home

Extended Damage Depth Determinations in AR- and H-Implanted Silica Glass

  • G.W. Arnold (a1), G. Battaglin (a2) and P. Mazzoldi (a3)

Abstract

Damage depths for Ar-implanted fused silica have been examined by Rutherford backscattering (RBS) and elastic recoil detection (ERD) ion-beam analysis. H incursion (6 at. %) from ambient atmospheres to twice TRIM values was found for damage depths which intersected the surface. H implants were used to decorate Ar damage for deeper Ar implants. The incursion of H for high-fluence implants is important for optoelectronic applications.

Copyright

References

Hide All
1 EerNisse, E.P., J. Appl. Phys. 45, 167 (1974).
2 Arnold, G.W., Mat. Res. Soc. Symp. Proc. Vol. 44, 617 (1985).
3 Arnold, G.W., Rad. Effects 65, 17 (1982).
4 Ziegler, J.F., Biersack, J.P., and Littmark, U., The Stopping and Range of Ions in Solids. (Pergamon, New York, 1985).
5 Arnold, G.W., Battaglin, G., Boscolo-Boscolleto, A., Caccavale, F., De Marchi, G., Mazzoldi, P., and Miotello, A., Nucl. Instrum. and Meth. B65, 387 (1992).
6 Arnold, G.W., Battaglin, G., Boscolo-Boscoletto, A., Caccavale, F., De Marchi, G., and Mazzoldi, P., Mat. Res. Soc. Symp. Proc. Vol. 235, 407 (1992).
7 Mazzoldi, P., Caccavale, F., Battaglin, G., Boscolo-Boscoletto, A., Priolo, F., and Arnold, G.W., Proceedings of Symposium on Material Synthesis and Modification by Ion Beams (Joint Symposium IUMRS and 2nd Ion Engineering Conference), Tokyo, Japan, 8/31-9/4/93 (to be published).
8 Arnold, G.W., Nucl. Instrum. and Meth. B32, 268 (1988).
9 Battaglin, G., Delia Mea, G., De Marchi, G., Mazzoldi, P., and Miotello, A., Nucl. Instrum. and Meth. B7/8, 517(1985).
10 Camera, A., Mazzoldi, P., Boscolo-Boscoletto, A., Caccavale, F., Bertoncello, E., Granozzi, R., Spagonol, G., and Battaglin, G., J. Non-Cryst. Solids 125, 293 (1990).
11 Arnold, G.W. and Doyle, B.L., Nucl. Instrum. and Meth. 194, 491 (1982).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed