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Excimer-Laser-Induced Melting and Solidification of PECVD a-Si films under Partial-Melting Conditions

  • Q. Hu (a1), Catherine S. Lee (a1) (a2), T. Li (a1), Y. Deng (a1), U.J. Chung (a1), A. B. Limanov (a1), A. M. Chitu (a1), M.O. Thompson (a3) and James S. Im (a1) (a2)...

Abstract

This paper reports on new experimental findings and conclusions regarding the pulsed-laser-induced melting-and-solidification behavior of PECVD a-Si films. The experimental findings reveal that, within the partial-melting regime, these a-Si films can melt and solidify in ways that are distinct from, and more complex than, those encountered in microcrystalline-cluster-rich LPCVD a-Si films. Specifically (1) spatially dispersed and temporally stochastic nucleation of crystalline solids occurring relatively effectively at the moving liquid-amorphous interface, (2) very defective crystal growth that leads to the formation of fine-grained Si proceeding, at least initially after the nucleation, at a sufficiently rapidly moving crystal solidification front, and (3) the propensity for local preferential remelting of the defective regions and grain boundaries (while the beam is still on) are identified as being some of the fundamental factors that can participate and affect how these PECVD films melt and solidify.

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1. Im, J. S., Kim, H. J., and Thompson, M. O., Appl. Phys. Lett. 63, 1969 (1993).10.1063/1.110617
2. Im, J. S., and Kim, H. J., Appl. Phys. Lett. 64, 2303 (1994).10.1063/1.111651
3. Yoon, J. H., (Columbia University, 1998).
4. Yoon, J. H., and Im, J. S., Metals and Materials 5, 525 (1999).10.1007/BF03026299
5. Hamer, J. W., Yamamoto, A., Rajeswaran, G., and Van Slyke, S. A., Digest of Technical papers - SID International Symposium 36, 1902 (2005).10.1889/1.2036392
6. Polman, A., Mous, D. J. W., Stolk, P. A., Sinke, W. C., Bulle-Lieuwma, C. W. T., and Vandenhoudt, D. E. W., Appl. Phys. Lett. 55, 1097 (1989).10.1063/1.101668
7. Polman, A., Roorda, S., Stolk, P. A., and Sinke, W. C., Journal of Crystal Growth 108, 114 (1991).10.1016/0022-0248(91)90359-D
8. Sinke, W. C., Polman, A., Roorda, S., and Stolk, P. A., Appl. Surf. Sci. 43, 128 (1989).10.1016/0169-4332(89)90201-8
9. Mariucci, L., Pecora, A., Fortunato, G., Spinella, C., and Bongiorno, C., Thin Solid Films 427, 91 (2003).10.1016/S0040-6090(02)01254-3
10. Thompson, M. O., Galvin, G. J., , M. J. W., Peercy, P. S., Poate, J. M., Jacobson, D. C., Cullis, A. G., and Chew, N. G., Phys. Rev. Lett. 52, 2360 (1984).10.1103/PhysRevLett.52.2360
11. Jellison, G. E., and Lowndes, D. H., Appl. Phys. Lett. 51, 352 (1987).10.1063/1.98438
12. Im, J. S., Kim, H. J., and Thompson, M. O., Appl. Phys. Lett. 63, 1969 (1993).10.1063/1.110617
13. Hazair, S., Van Der Wilt, P. C., Deng, Y., Chung, U. J., Limanov, A. B., and Im, J. S., Mat. Res. Soc. Symp. Proc. 979, HH11 (2006).
14. Cho, H. S., Kim, D., Limanov, A. B., Crowder, M. A., and Im, J. S., Mat. Res. Soc. Symp. Proc. 621, Q9.9.1 (2001).
15. Lowndes, D. H., Pennycook, S. J., Jellison, G. E. Jr., Withrow, S. P., and Mashburn, D. N., Journal of Materials Research 2, 648 (1987).10.1557/JMR.1987.0648
16. Mariucci, L., Pecora, A., Fortunato, G., Spinella, C., Bongiorno, C., Thin Solid Films 427, 91 (2003).10.1016/S0040-6090(02)01254-3

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