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Excimer Laser Thin Metallic Film Patterning on Polyvinyledene Difluoridea)

Published online by Cambridge University Press:  25 February 2011

Michel Gauthier ,
Richard Bourret ,
Cheng-Kuei Jen  and
Eric L Adler
Michel Gauthier
Affiliation:
Laser Chemistry Group, Division of Chemistry, National Research Council of Canada, Ottawa, Ontario, Canada, KIA 0R6
Richard Bourret
Affiliation:
Laser Chemistry Group, Division of Chemistry, National Research Council of Canada, Ottawa, Ontario, Canada, KIA 0R6
Cheng-Kuei Jen
Affiliation:
Industrial Materials Research Institute, NRCC, 75 Boul. de Mortagne, Boucherville, Québec, Canada, J4B 6Y4
Eric L Adler
Affiliation:
Department of Electrical Engineering, McGill University, 3480 University St., Montréal, Québec, Canada, H3A 2A7
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Abstract

Tactile sensors and ultrasonic transducers based on the piezoelectric properties of polyvinyledene difluoride, PVF2, usually take the form of thin 10 - 110 μm polymer films coated on one or both sides with a metallic film. Electrode patterns are usually fabricated by photolithography that requires a 90 °C baking process which may harm the piezoelectric properties of the PVF2 film. We have developed an alternate method, based on direct patterning with a XeCl laser, yielding complex patterns of lines as narrow as 20 μm which are better than those fabricated by photolithography. The metallic film is ablated on both sides of the polymer while maintaining the intrinsic properties of the PVF2. The ablation mechanism is investigated using transmission optical, scanning electron, and scanning acoustic microscope images. The performance of an ultrasonic transducer fabricated with this technique is described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 129: Symposium B – Laser and Particle-Beam Modification of Chemical Processes on Surfaces , 1988 , 399
Copyright
Copyright © Materials Research Society 1989

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References

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