Hostname: page-component-848d4c4894-8kt4b Total loading time: 0 Render date: 2024-06-21T04:45:37.283Z Has data issue: false hasContentIssue false
  • English
  • Français

Excimer Laser Fabrication of Polycrystalline ZrO2 Layers

Published online by Cambridge University Press:  10 February 2011

N. Starbov ,
B. Mednikarov ,
V. Mankov ,
D. G. Georgiev ,
F. Hanus ,
K. Kolev  and
L. D. Laude
N. Starbov
Affiliation:
CLAPHOP, Bulg.Acad.of Sci., Acad.G.Bonchev Str.,Bl.109,Sofia 1113, Bulgaria
B. Mednikarov
Affiliation:
CLAPHOP, Bulg.Acad.of Sci., Acad.G.Bonchev Str.,Bl.109,Sofia 1113, Bulgaria
V. Mankov
Affiliation:
CLAPHOP, Bulg.Acad.of Sci., Acad.G.Bonchev Str.,Bl.109,Sofia 1113, Bulgaria
D. G. Georgiev
Affiliation:
CLAPHOP, Bulg.Acad.of Sci., Acad.G.Bonchev Str.,Bl.109,Sofia 1113, Bulgaria
F. Hanus
Affiliation:
University of Mons-Hainaut, Laboratory of Solid State Physics, av.Maistriau 23, Mons 7000, Belgium.
K. Kolev
Affiliation:
University of Mons-Hainaut, Laboratory of Solid State Physics, av.Maistriau 23, Mons 7000, Belgium.
L. D. Laude
Affiliation:
University of Mons-Hainaut, Laboratory of Solid State Physics, av.Maistriau 23, Mons 7000, Belgium.
Get access

Abstract

Polycrystalline zirconia layers have remarkable low thermal conductivity and thermal expansion coefficient, high melting temperature and mechanical properties which are objects of interest in materials science. In this work thin polycrystalline zirconia films were obtained by two different excimer laser treatment ways. In the first one, pulsed laser deposition (PLD) is used to obtain directly as-deposited polycrystalline layers from a sintered, partially stabilized zirconia target. In the second one, excimer laser irradiation is used to crystallize previously electron gun-deposited amorphous zirconia films. Reflection high energy electron diffraction(RHEED) and low angle X-ray diffraction(LAXRD)-techniques were used to study the structure evolution of both types of films. In both cases, it is shown that cubic polycrystalline films are readily obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 217
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Block, S.,Jornada, J.A.H.Da and Piermarini, G.J., J.Am.Ceram.Soc. 68, 497 (1985)Google Scholar
2. Encyclopedia of Materials Science and Engineering, Vol.7 (Pergamon Press, 1986)Google Scholar
3. Arashi, H., Shimomura, O., Yagi, T., Akimoto, S. and Kudoh, Y., in Science and Technology of Zirconia III, edited by Somiya, S., Yamamoto, N. and Hanagida, H., Advances in Ceramics Vol.24 (American Ceramic Society, Westerwille, OH, 1988), pp.493–500.Google Scholar
4. Science and Technology of Zirconia I, edited by Heuer, A.H. and Hobbs, L.W., Advances in Ceramics Vol.3 (American Ceramic Society, Westerville, OH, 1981)Google Scholar
5. Fischer, G., Ceramic Bull., Vol.65, 622 (1986)Google Scholar
6. Zirconia, V, edited by Badwal, S.P.S. and Hannink, R.H.J. (Australian Ceramic Society, Melbourne, 1992)Google Scholar