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Evolution of the Luminescence Spectrum During the Dry and Steam Oxidation of SiGe Films

  • A. Rodríguez (a1), J. Sangrador (a1), T. Rodríguez (a1), A. C. Prieto (a2), M. Avella (a2) and J. Jiménez (a2)...

Abstract

The luminescence emission arising from SiGe layers oxidized in dry or wet atmospheres has been studied and the results obtained in both cases have been compared. Additional characterization of the samples by Raman and FTIR spectroscopies, which give information on the remaining SiGe layer and on the composition of the growing oxides respectively, have allowed the luminescence and the structural features of the samples at each stage of the oxidation processes to be correlated. SiGe layers of two different thickness have been used in order to clearly establish the origin of the different emissions, eliminating the contribution of the oxide and linking them to the presence of nanoparticles.

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Evolution of the Luminescence Spectrum During the Dry and Steam Oxidation of SiGe Films

  • A. Rodríguez (a1), J. Sangrador (a1), T. Rodríguez (a1), A. C. Prieto (a2), M. Avella (a2) and J. Jiménez (a2)...

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