The factors affecting optical gain were studied for Er-doped BaTiO3 thin film waveguides. Er-doped BaTiO3 with dopant concentrations of 0.3 – 9 at.% was deposited by metal-organic chemical vapor deposition. The luminescence efficiency was maximized by optimizing the growth temperatureand erbium concentration as well as by post-deposition annealing. Stimulated emission was studied using the pump-probe technique over the spectral range of 1,520-1,550 nm. A maximum differential gain of 3 dB/cm wasmeasured at 1,540 nm in an 8 mm long, 8 μm wide ridge waveguide.