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Epitaxial Growth of Pt(001) Thin Films on MgO(001) Under Oxidizing Conditions

Published online by Cambridge University Press:  21 February 2011

G. Cui ,
P. C. Van Buskirk ,
J. Zhang ,
C. P. Beetz Jr. ,
J. Steinbeck ,
Z. L. Wang  and
J. Bentley
G. Cui
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
P. C. Van Buskirk
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
J. Zhang
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
C. P. Beetz Jr.
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
J. Steinbeck
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Drive, Danbury, CT 06810
Z. L. Wang
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6376
J. Bentley
Affiliation:
Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6376
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Abstract

Epitaxial Pt(001) thin films have been grown on MgO(001) substrates using dc magnetron sputtering with an Ar/O2 mixture at 700°C. The width (FWHM) of the rocking curve of the Pt(002) peak is between 0.16° and 0.20°, which is only 0.05° wider than that of the MgO (002) peak of the cleaved substrate. The film surface roughness is about 1 nm (rms) for a 240 nm thick Pt film. No grain structure could be observed using SEM. In contrast, the films deposited at 700 °C with pure Ar, have both Pt(111) and Pt(001) oriented growth, as shown by XRD Θ - 2 Θ scans, with the Pt(111) peak having the largest intensity. BaTiO3 epitaxial films have also been deposited on Pt(001)/MgO(001). The width (FWHM) of the rocking curve of the BaTiO3(200) peak is 0.4°. The surface morphology of the epitaxial BaTiO3(100) thin films on Pt(001)/MgO(001) is featureless. XRD pole figure measurements on Pt/BaTiO3/Pt trilayer shown a very good in-plane alignment of all layers. The epitaxial growth relationship was also confirmed by TEM electron diffraction and cross-section imaging. The Pt/BaTiO3/Pt epitaxial trilayer could serve as a prototype for ferroelectric capacitors and may be able to improve the electrical properties of the capacitors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 345
Copyright
Copyright © Materials Research Society 1993

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References

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