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Epitaxial Growth of Ferroelectric Pb(Zr,Ti)O3 Layers on GaAs

  • Benjamin Meunier (a1), Lamis Louahadj (a2), David Le Bourdais (a3), Ludovic Largeau (a4), Guillaume Agnus (a3), Philippe Lecoeur (a3), Valérie Pillard (a3), Lucie Mazet (a1), Romain Bachelet (a1), Philippe Regreny (a1), Claude Botella (a1), Geneviève Grenet (a1), David Albertini (a5), Catherine Dubourdieu (a1), Brice Gautier (a5) and Guillaume Saint-Girons (a1)...

Abstract

Ferroelectric epitaxial Pb(Zr,Ti)O3 (PZT) layers were grown by pulsed laser deposition on SrTiO3/GaAs templates fabricated by molecular beam epitaxy. The templates present an excellent structural quality and the SrTiO3/GaAs is abrupt at the atomic scale thanks to surface Ti pre-treatment. The PZT layers contain a- and c- domains, as shown by X-Ray diffraction analyses. Piezoforce microscopy experiments and macroscopic electrical characterizations indicate that PZT is ferroelectric. A relative dielectric permittivity of 164 is extracted from these measurements.

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Keywords

Epitaxial Growth of Ferroelectric Pb(Zr,Ti)O3 Layers on GaAs

  • Benjamin Meunier (a1), Lamis Louahadj (a2), David Le Bourdais (a3), Ludovic Largeau (a4), Guillaume Agnus (a3), Philippe Lecoeur (a3), Valérie Pillard (a3), Lucie Mazet (a1), Romain Bachelet (a1), Philippe Regreny (a1), Claude Botella (a1), Geneviève Grenet (a1), David Albertini (a5), Catherine Dubourdieu (a1), Brice Gautier (a5) and Guillaume Saint-Girons (a1)...

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