Hostname: page-component-8448b6f56d-xtgtn Total loading time: 0 Render date: 2024-04-25T01:25:01.807Z Has data issue: false hasContentIssue false
  • English
  • Français

Enhanced Hardness and Stress-Driven Delamination in Fe/Pt Multilayers

Published online by Cambridge University Press:  15 February 2011

B.J. Daniels ,
W.D. Nix  and
B.M. Clemens
B.J. Daniels
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
W.D. Nix
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
B.M. Clemens
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205
Get access

Abstract

Polycrystalline Fe/Pt multilayers of varying bilayer period, Λ, were sputter deposited onto SiO2 at room temperature. Film structure was characterized by x-ray diffraction, hardness was determined using nanoindentation, and stresses were examined with wafer curvature. The Fe layers were shown to be predominantly {110} oriented while the Pt layers were mostly {111} oriented. The hardnesses of these multilayer films were enhanced over the rule of mixtures value by a factor of almost 3 and exhibited a dependence on Λ which was similar to that previously observed in epitaxial Fe(001)/Pt(001) multilayers. The hardnesses of the polycrystalline multilayers were higher than those of the epitaxial multilayers, presumably due to grain boundary strengthening in these films. Film stress was large (∼1.5 GPa) and compressive, resulting in buckling-driven delamination of the film from the substrate for films with 40≤Λ≤100 Å. Delamination occurred in the “telephone cord” morphology and was observed in real time. A qualitative discussion of our observations of this delamination mechanism is presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 382: Symposium G – Structure and Properties of Multilayered Thin Films , 1995 , 315
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Daniels, B.J., Nix, W.D., and Clemens, B.M., Mater. Res. Soc. Symp. Proc. 343, 549 (1994).Google Scholar
2. Daniels, B.J., Nix, W.D., and Clemens, B.M., Thin Solid Films, 253, 218 (1994).Google Scholar
3. Daniels, B.J., Nix, W.D., and Clemens, B.M., Mater. Res. Soc. Symp. Proc. 356 (1995).Google Scholar
4. Daniels, B.J., Nix, W.D., and Clemens, B.M., accepted Appl. Phys. Lett. (1995).Google Scholar
5. Ortiz, M. and Gioia, G., J. Mech. Phys. Solids 42, 531 (1994).Google Scholar
6. Hutchinson, J.W., Thouless, M.D., and Liniger, E.G., Acta Metall. Mater. 40, 295 (1992).Google Scholar
7. Yelon, A. and Veogeli, O., Single-Crystal Films, (Pergamon Press, New York, 1964), p 321.Google Scholar
8. Daniels, B.J., Nix, W.D., and Clemens, B.M., to be submitted to Acta. Metall. Mater. (1995).Google Scholar
9. Baker, S.P. and Nix, W.D., J. Mater. Res. 9, 3145 (1994).Google Scholar