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Encapsulation of Silver Via Nitridation of Ag/Ti Bilayer Structures

  • Y. L. Zou (a1), T. L. Alford (a1), D. Adams (a1), T. Laursen (a2), K.-N. Tu (a3), R. Morton (a4) and S. S. Lau (a4)...


Ag/Ti bilayer films deposited on silicon dioxide substrates were annealed in ammonia ambient in the temperature range of 400 - 600 °C. Rutherford backscattering spectrometry (RBS) and Auger electron spectroscopy (AES) have shown that Ti segregates to both the surface to form a TiN(O) layer and to the Ti/SiO2 interface to form a Ti-oxide/Ti-silicide bilayer. The annealed bilayer structure had minimal Ti accumulations in Ag. Resistivity values of ˜2 μΩ-cm were obtained in encapsulated Ag bilayer films, which are comparable to that of the as-deposited. X-ray analysis confirmed the absence of intermetallic phase transformation.



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[1] lijima, T., Ono, H., Ninomiya, N., Ushiku, Y., Hatanaka, T., Nishiyama, A., and Iwai, H., Extended Abstracts, Conf. on Solid State Devices and Materials, Makuhari, 183 (1993).
[2] Sinclair, J. D., J. Electrochem. Soc.: Electrochem Sci. and Tech., Vol.129, No. 1, 1982
[3] Alford, T. L., Adams, D., Laursen, T. and Ullrich, B. M., Appl. Phys. Lett., accepted, 1996
[4] Li, J., Mayer, J. W., Shacham-Diamand, Y. and Colgan, E. G., Appl. Phys. Lett., 60 (1992) 2983
[5] Li, J. and Mayer, J. W., Mater. Chem. Phys., 32 (1992) 1.
[6] Russell, S. W., Rafalski, S. A., Spreitzer, R. L., Li, J., Moinpur, M., Moghadam, F., Alford, T. L., Thin Solid Films, 262 (1995) 154.
[7] Adams, D., Alford, T. L., Theodore, N. D., Russell, S. W., Spreitzer, R. L., Mayer, J. W., Thin Solid Films, 262 (1995) 199.
[8] Doolittle, L. R., Nucl. Instrum. Methods B, 9 (1985) 344.
[9] Kittel, C., Introduction to Solid State Physics. 5th Edition, (John Wiley & Sons, New York 1976, p. 17 1.
[10] Binary Alloy Phase Diagrams, edited by Maisalski, Thaddeus B, (American Society for Metals, Metals park, OH 1986).


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