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Emission Characteristics of the Mo-Coated Silicon Tips

  • Heung-Woo Park (a1), Byeong-Kwon Ju (a1), Jae-Hoon Jung (a1), Yun-Hi Lee (a1), Jung-Ho Park (a2), In-Jae Chung (a3), M. R. Hascard (a3) and Myung-Hwan Oh (a1)...


Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.



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2. Jiang, J.C. and White, R.C., SID '93 Digest, 596 (1993)
3. King, R.A. et al., J. Vac. Sci. Technol. B 13(2), 603 Mar/Apr (1995)
4. Liu, J. et al., J. Vac. Sci. Technol. B 13(2), 422 Mar/Apr (1995)


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