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Electrical Properties in Cvd Diamond Films

  • S. Zhao (a1), K.K. Gan (a1), H. Kagan (a1), R. Kass (a1), R. Malchow (a1), F. Morrow (a1), W. Palmer (a1), C. White (a1), L.S. Pan (a2), S. Han (a2), D. Kania (a2), M. Plano (a3), M. Landstrass (a3), M. Lee (a4), S. Kim (a4), F. Sannes (a4), S. Schnetzer (a4), R. Stone (a4), G. Thomson (a4), Y. Sugimoto (a5), A. Fry (a6), S. Kanda (a7) and S. Olsen (a7)...

Abstract

The electrical properties associated with carrier mobility, μ, and lifetime, τ, have been investigated for the chemical vapor deposited (CVD) diamond films using charged particle-induced conductivity and time resolved transient photo-induced conductivity. The collection distance, d, the average distance which electron and hole depart when driven by an applied electric field E, was measured by both methods. The collection distance is related to the carrier mobility and lifetime by d = μEτ Our measurements show that the collection distance increases linearly with sample thickness for CVD diamond films. The collection distance at the growth side of the CVD diamond film is comparable to that of single crystal natural type IIa diamond; at the substrate side of the film, the collection distance is near zero. No saturation of the collection distance is observed for film thickness up to 500 microns.

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1. CVD diamond films presented in this paper were fabricated by Norton Diamond Films and Crystallume Inc. in 1991. The films were grown by two different processes, DC Arc Jets and microwave enhanced CVD, and varied in optical quality from opaque to translucent.
2. Pan, L. S. et al. , J. Appl. Phys., accepted for publication (1993).
3. Zhao, S., PhD thesis, The Ohio State University (1993).
4. Franklin, M. et al. , Nucl. Instr. and Math., A315, 39 (1992).
5. Plano, M. A. et al. , submitted to Appl. Phys. Lett. (1993).
6. Pan, L. S. et al. , in the Proceedings of MRS Spring Meeting, Symposium F (1993).

Electrical Properties in Cvd Diamond Films

  • S. Zhao (a1), K.K. Gan (a1), H. Kagan (a1), R. Kass (a1), R. Malchow (a1), F. Morrow (a1), W. Palmer (a1), C. White (a1), L.S. Pan (a2), S. Han (a2), D. Kania (a2), M. Plano (a3), M. Landstrass (a3), M. Lee (a4), S. Kim (a4), F. Sannes (a4), S. Schnetzer (a4), R. Stone (a4), G. Thomson (a4), Y. Sugimoto (a5), A. Fry (a6), S. Kanda (a7) and S. Olsen (a7)...

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