Skip to main content Accessibility help
×
Home

Electrical Characterization of Aluminum Nitride Films on Silicon Grown by Chemical Vapor Deposition

  • A. H. Khan (a1), J. M. Meese (a1), T. Stacy (a1), E. M. Charlson (a1), E. J. Charlson (a1), G. Zhao (a1), G. Popovici (a2) and M. A. Prelas (a2)...

Abstract

Aluminum nitride (AlN) films were grown on silicon (Si) substrates by chemical vapor deposition (CVD). The films were characterized by scanning electron microscopy (SEM) and x-ray diffraction (XRD). The refractive index of the AlN films was determined by ellipsometry. Current-voltage and current-temperature characteristics were performed on metal-AlN-p+ Si structures with Pt, Au and Al as metal electrodes. The characteristics showed that at high field and high temperature the carrier conduction mechanism in the film was dominated by Frenkel-Poole emission. The relative dielectric constant of the AlN films was estimated to be 9.66+0.3 from capacitance-voltage-frequency (C-V-f) measurements on Au-AlN-p+ Si.

Copyright

References

Hide All
1. Khan, A. H., Odeh, M. F., Meese, J. M., Charlson, E. M., Charlson, E. J., Stacy, T., Popovici, G., Prelas, M. A., and Wragg, J. L., accepted for publication in J. Mater. Sci.
2. ASTM card 25–1133.
3. Pastrnak, J. and Roskovcova, L., Phys. Stat. Soi., 14, K5 (1966).
4. Bauer, J., Biste, L., and Bolze, D., Phys. Stat. Sol., A 39, 173 (1977).
5. Sze, S. M., Physics of Semiconductor Devices, (J. Wiley Publishers, India, 1986), chapter 7.
6. Collins, A. T., Lightowlers, E. C., and Dean, P. J., Phys. Rev., 158, 833 (1967).

Electrical Characterization of Aluminum Nitride Films on Silicon Grown by Chemical Vapor Deposition

  • A. H. Khan (a1), J. M. Meese (a1), T. Stacy (a1), E. M. Charlson (a1), E. J. Charlson (a1), G. Zhao (a1), G. Popovici (a2) and M. A. Prelas (a2)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed