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Electrical and Optical Properties of Thermid Polyimide

  • Patrick G. Jobe (a1), Christine Puglisi (a1), Z. X. Zhu (a2), K. J. Fang (a2), D. Liu (a2), N. Patel (a2), E. Niver (a2), H. Grebel (a2), G. M. Qin (a3), K. D. Moller (a3), S. N. Zhao (a3), G. Feng (a3), N. M. Ravindra (a3) and K. K. Chin (a3)...

Abstract

THERMID, made of acetylene-terminated polyimide oligomers, was developed by National Starch & Chemical Co. It is capable of forming thicker deposits than conventional polyimides. It is a candidate for a broad array of electronic and optoelectronic applications, including passivation coating, alpha-particle barrier, interlayer dielectric, encapsulation of discrete devices and IC, optical waveguide, and multilayer dielectric for thin hybrids. The study and evaluation of electrical and optical properties of THERMID polyimide give more support to their application in the semiconductor industry.

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References

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[1] Kern, W., Semiconductor International, August, 1987, 81.
[2] THERMID EL-5000 Series Pofyimides, National Starch & Chemical Co., P. O. Box 6500, Bridgewater, NJ 08807
[3] Keithley 236 Source Measure Unit Application Manual, Keithley Instruments, Inc. Cleveland, Ohio, 1984, pp2–8.
[4] bell, R., Introductory Fourier Transform Spectroscopy, (Academic Press, 1972), pp237250.

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