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Electric and Optical Properties of μc-Si,Ge:H Alloys Deposited by Reactive Magnetron Sputtering (RMS)

Published online by Cambridge University Press:  15 February 2011

S. M. Cho ,
D. Wolfe ,
K. Christensen ,
G. Lucovsky  and
D. M. Maher
S. M. Cho
Affiliation:
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering, North Carolina State University, Raleigh, N.C. 27695-8202
D. Wolfe
Affiliation:
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering, North Carolina State University, Raleigh, N.C. 27695-8202
K. Christensen
Affiliation:
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering, North Carolina State University, Raleigh, N.C. 27695-8202
G. Lucovsky
Affiliation:
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering, North Carolina State University, Raleigh, N.C. 27695-8202
D. M. Maher
Affiliation:
Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering, North Carolina State University, Raleigh, N.C. 27695-8202
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Abstract

Amorphous and microcrystalline silicon-germanium alloys, a-SixGel-x:H and μc-SixGel-x:H, respectively, have been prepared by reactive magnetron sputtering (RMS) from pure crystalline Si and Ge targets in a hydrogen ambient using argon as the sputtering gas. We have investigated the structural, optical, and electronic properties of the as-deposited films. The optical and electrical properties, e.g., the ambipolar diffusion length, photoconductivity, and photosensitivity, were found to be comparable to those of device-grade a-SixGe1-x:H alloys, e.g., films with x ∼ 0.5, and band-gaps ∼ 1.3–1.4 eV. In contrast to the behavior of the a-SixGel-x:H alloys, the μc-SixGe1-x:H alloys do not display a Staebler-Wronski effect, as manifested by a decay of the photoconductivity under intense illumination.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 471
Copyright
Copyright © Materials Research Society 1996

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References

1. Sturn, J.C., Prinz, E.J. and Magee, C.W., IEEE Electron Device Lett 12, 303 (1991).Google Scholar
2. Lin, T.L., George, T., Jones, E.W., Ksenzov, A., and Huberman, M.L., Appl, Phys, Lett. 60, 380 (1992).Google Scholar
3. Cho, S.M., Wolfe, D., He, S.S., Christensen, K., Lucovsky, G., and Maher, D.M., Mater. Res. Soc. Symp. Proc. 358, 781 (1994).Google Scholar
4. Cho, S.M., Christensen, K., Lucovsky, G., and Maher, D. M., J. Non-Cryst. Solids (1995) in press.Google Scholar
5. Cullity, B.D., “Elements of X-ray Diffraction”, Addison-Wesley, Messachusetts (1978).Google Scholar
6. Rudder, R.A., Cook, J.W, and Lucovsky, G., Appl. Phys. Lett. 43, 871 (1983); Appl. Phys. Lett. 45, 887 (1984).Google Scholar
7. Veprek, S., Iqbal, Z., Oswald, H.R., and Webb, A.P., J. Phys., 14, 295 (1981).Google Scholar
8. D. Ritter Zeldov, E. and Weiser, K., Phys. Rev. B 34, 9031 (1986).Google Scholar
9. Moddel, G., Anderson, D.A., and Paul, W., Phys. Rev. B 22, 1918 (1980).Google Scholar
10. Vanecek, M., Kocka, J., Stuchilik, J., Kozisek, Z., Stika, O. and Triska, A., Sol. Energy Mater. 8, 411 (1983).Google Scholar
11. Jackson, W.B. and Amer, N.M., Phys. Rev. B 25, 5559 (1982).Google Scholar
12. A, Skumanich, A., Frova, N.M., Amer Solid State commun. 54, 597 (1985).Google Scholar
13. Bauer, G.H., Nebel, C.E., Mohring, H.-D, Mater. Res. Soc. Symp. Proc. 118, 679 (1988).Google Scholar