Skip to main content Accessibility help
×
Home

The Effects of High Temperature Annealing and Composition on the Dielectric Properties of Thin Films of BaxSrzTiO3

  • Adriaan C. Carter (a1), James S. Horwitz (a1), Douglas B. Chrisey (a1), Jeffrey M. Pond (a1), Steven W. Kirchoefer (a1), Wontae. Chang (a1) and Patricia Loferski (a1)...

Abstract

Single phase, (100) oriented Ba0.5Sr0.5TiO3 films have been deposited by pulsed laser deposition onto (100) LaAIO3, SrTiO3, MgO substrates. The dielectric properties of these films were measured using interdigitated capacitors as a function of DC bias and temperature at 1 MHz and as a function of DC bias at 1 to 20 GHz at room temperature. Deposited films were annealed over a temperature range of 900 to 1350 C for 1 to 8 hours to observe its effect on dielectric properties. Chemical analysis on films deposited from stoichiometric targets showed the films to be up to 6% deficient in Ba and Sr under typical PLD deposition conditions. Optimal annealing conditions and target stoichiometries for minimizing dielectric loss and maximizing tuning are discussed.

Copyright

References

Hide All
1. Varadan, V. K., Gohdagaonkar, D. K., Varadan, V. V., Kelly, J. F., Glikerdas, P., Microwave Journal, 35, 116, (1992).
2. Carroll, K. R., Pond, J. M., Chrisey, D. B., Horwitz, J. S., Leuchtner, R. E., Grabowski, K. S., Applied Physics Letters, 62, 1845–7, (1993).
3. Lines, M. E., Glass, A. M., Principles and Applications of Ferroelectirc and Related Materials (Clarendon Press, Oxford, 1977), p. 242, 244, 246, 252.
4. Lines, M. E., Glass, A. M., Principles and Applications of Ferroelectirc and Related Materials (Clarendon Press, Oxford, 1977), p. 139.
5. Kumar, U., Wang, S. F., Varanasi, S., Dougherty, J. P., ISAR '92 Proceedings of the Eighth International Symposium on Applications of Ferroelectrics, 55–8, (1992).
6. Triebwasser, S., Physical Review, 114, (1959).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed