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Effects of Deposition Conditions on The Microstructure and Properties of CVD SiC

  • Eric Minford (a1) (a2), Robert E. Stevens (a1) (a2), Vincent L. Magnotta (a1) (a2), Paul N. Dyer (a1) (a2), Thomas R. Watkins (a3) (a2) and David J. Green (a3) (a2)...

Abstract

As part of an ongoing program to develop high performance silicon carbide coatings for graphite, a research study into the effects of deposition conditions on residual stresses was initiated. A series of experiments was conceived and implemented to explore the microstructure and the elastic properties of the coatings and substrates as well as to directly measure the residual stress states. The results of these experiments are analyzed with respect to the effects of deposition temperature on the microstructure and properties of CVD SiC on graphite and how the observed differences affect the residual stresses in the coatings.

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1. Popov, E.P., Mechanics of Materials, 2nd ed. (Prentice-Hall, Inc., Englewood Cliffs, NJ, 1976).
2. Spinner, S. and Tefft, W.E., Proc. ASTM 61, 1221–38 (1961).
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4. Chung, D.H. and Buessem, W.R., in Anisotropy in Single-Crystal Refractory Compounds, vol. 2, edited by Vahldiek, F.W. and Mersol, S.A. (Plenum Press, New York, 1968), pp. 217–45.

Effects of Deposition Conditions on The Microstructure and Properties of CVD SiC

  • Eric Minford (a1) (a2), Robert E. Stevens (a1) (a2), Vincent L. Magnotta (a1) (a2), Paul N. Dyer (a1) (a2), Thomas R. Watkins (a3) (a2) and David J. Green (a3) (a2)...

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