Skip to main content Accessibility help

The Effect of Rapid Thermal Annealing on the Dislocation Structure of Silicon on Sapphire

  • M. Aindow (a1) (a2), J. L. Batstone (a1), L. Pfeiffer (a3), J. M. Phillips (a3) and R. C. Pond (a1)...


A Transmission Electron Microscopy study of the defect microstructure in Silicon On Sapphire before and after Rapid Thermal Annealing is presented. The annealed material is shown to contain a much lower density of twins and threading dislocations. Comparison with the asgrown microstructure enables possible explanations to be proposed for these observations in terms of the removal of barriers to the introduction and movement of dislocations in response to misfit and thermal expansion strains. A regular array of misfit dislocations is observed in the interface of annealed material. These have non-rational line directions and are consistent with complete misfit accommodation.



Hide All
1. Pfeiffer, L., Phillips, J.M., Luther, K.E., West, K.W., Batstone, J.L., Stevie, F.A. and Maurits, J.E.A., Appl. Phys. Lett. 50, 466 (1987).
2. Phillips, J.M., Batstone, J.L. and Pfeiffer, L. in Heteroepitaxy on Silicon II, edited by Fan, J.C.C., Phillips, J.M. and Tsaur, B.Y. (Mater. Res. Soc. Proc. 91, 1987) pp.365370.
3.See, for example, Smith, R.T. and Weitzel, C.E. J. Cryst. Growth 58, 61 (1982).
4. Paus, K.C. D.Phil. Thesis, Oxford University (1987).
5. Aindow, M. and Pond, R.C., (in preparation).
6. Hayashi, T. and Kurosawa, S., J. Cryst. Growth 45, 426 (1978).
7. Abrahams, M.S., Weisberg, L.R., Buiocchi, C.J. and Blanc, J., J. Mat. Sci. 4, 223 (1969).
8. Matthews, J.W., J. Vac. Sci. Technol. 12, 126 (1975).
9. Heral, H., Rocher, A., Charasse, M.N., Georgakilas, A., Chazelas, J., Hirtz, J.P., Blanck, H. and Seijka, J. in Epitaxy of Semiconductor Layered Structures, edited by Tung, R.T., Dawson, L.R. and Gunshor, R.L. (Mater. Res. Soc. Proc. 102, 1988) pp 5156.
10. Abrahams, M.S., Buiocchi, C.J., Corboy, J.F. Jr, and Cullen, G.W., Appl. Phys. Lett. 2a, 275 (1976).
11. Ponce, F.A., Appl. Phys. Lett. 4–1, 371 (1982).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed