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Effect of Pb Excess Content on Microstructure and Electrical Properties of Sol Gel Derived PZT Thin Films

Published online by Cambridge University Press:  10 February 2011

Zhan-jie Wang ,
Ryutaro Maeda  and
Kaoru Kikuchi
Zhan-jie Wang
Affiliation:
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of International Trade and Industry, 1–2 Namiki, Tsukuba, Ibaraki 305–8564, Japan
Ryutaro Maeda
Affiliation:
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of International Trade and Industry, 1–2 Namiki, Tsukuba, Ibaraki 305–8564, Japan
Kaoru Kikuchi
Affiliation:
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of International Trade and Industry, 1–2 Namiki, Tsukuba, Ibaraki 305–8564, Japan
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Abstract

Lead zirconate titanate (PZT) thin films were fabricated by a three-step heat-treatment process which involves the addition of -10, 0 and 10 mol% excess Pb to the starting solution and spin coating onto Pt/Ti/SiO2/Si substrates. Crystalline phases as well as preferred orientations in PZT films were investigated by X-ray diffraction analysis (XRD). The microstructure and composition of the films were studied by scanning electron microscopy (SEM), transmission electron microscopy (TEM) and electron probe microanalysis (EPMA), respectively. The well-crystallized perovskite phase and the (100) preferred orientation were obtained by adding 10% excess Pb to the starting solution. It was found that PZT films to which 10% excess Pb was added had better electric properties. The remanent polarization and the coercive field of this film were 34.8 μC/cm2 and 41.7 kV/cm, while the dielectric constant and loss values measured at 1 kHz were approximately 1600 and 0.04, respectively. Dielectric and ferroelectric properties were correlated to the microstructure of the films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 596: Symposium Y – Ferroelectric Thin Films VIII , 1999 , 229
Copyright
Copyright © Materials Research Society 2000

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