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The Effect of Incomplete Collision Cascades on The Angle of Ion Incidence Behaviour of Interface Mixing

  • R.P. Webb (a1) and I.H. Wilson (a1)

Abstract

A new geometrical theory of sputtering is extended to investigate the behaviour of interface mixing as a function of the angle of ion incidence. It is found that the amount of mixing peaks with the angle of incidence at different angles depending upon the depth of the interface. When the interface is at the surface the mixing parameter behaves as the sputtering yield and maximises around 70°, whilst deeper interfaces, around the damage range, have maximum mixing at normal incidence.

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1)See for example: Nucl. Instr. and Meth. 182/183 (1981) Section I.
2) Wilson, I.H., Chereckdjian, S. and Webb, R.P., Proc. 4th Int. Conf. on Ion Beam Modification of Materials, Cornell (1984), to be published in Nucl. Instr. and Meth. (1985).
3) Webb, R.P. and Harrison, D.E. Jr, Nucl. Instr. and Meth. 218 (1983) 697.
4). Webb, R.P. and Harrison, D.E. Jr, Rad. Effects Letts. 86(1) (1983) 15.
5) Dumke, M.F., Tombrello, T.A., Weller, R.A., Housley, R.M. and Cirlin, E.H., Surf. Science 124 (1983) 407.
6) Harrison, D.E. Jr, Rad. Effects 70(1983) 1.
7) Macrander, A.T., “Modifications to the TRIM Monte Carlo Programme”, unpublished report #4234, Materials Science Center, Cornell University, (1980).

The Effect of Incomplete Collision Cascades on The Angle of Ion Incidence Behaviour of Interface Mixing

  • R.P. Webb (a1) and I.H. Wilson (a1)

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