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Effect of Growth Conditions on Electronic and Structural Properties of GZO Films Grown by Plasma-enhanced Molecular Beam Epitaxy on p-GaN(0001)/Sapphire Templates

  • H.Y. Liu (a1), V. Avrutin (a1), N. Izyumskaya (a1), M.A. Reshchikov (a2), S. Wolgast (a3), C. Kurdak (a3), A.B. Yankovich (a4), A. Kvit (a4), P. Voyles (a4), Ü. Özgür (a1) and H. Morkoç (a1) (a2)...

Abstract:

We report on a strong effect of p-GaN surface morphology on the growth mode and surface roughness of ZnO:Ga films grown by plasma-assisted molecular-beam epitaxy on p-GaN/c-sapphire templates. A range of ZnO:Ga surface morphologies varying from rough surfaces with well defined three-dimensional islands, capable to enhance light extraction in light-emitting diodes, to rather smooth surfaces with a surface roughness of ~ 2 nm suitable for vertical-cavity lasers can be achieved by controlling the surface morphologies of p-GaN. Optical transmittance measurements revealed high transparency exceeding 90% in the visible spectral range for ZnO:Ga with both types of surface morphology.

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1. Liu, H.Y., Avrutin, V., Izyumskaya, N., Reshchikov, M.A., Özgür, Ü., and Morkoç, H., Phys. Status Solidi RRL 4, 70 (2010).
2. Sheu, J.-K., Lu, Y. S., Lee, M.-L., Lai, W. C., Kuo, C. H., and Tun, C.-J., Appl. Phys. Lett. 90, 263511 (2007).
3. Liu, H.Y., Avrutin, V., Izyumskaya, N., Özgür, Ü., Morkoç, H., Superlattices & Microstructures 48, 458 (2010).
4. Liu, H.Y., Li, X., Ni, X., Avrutin, V., Izyumskaya, N., Özgür, Ü., and Morkoç, H., Proc. SPIE, 7602, 76021 (2010).
5. Li, X., Liu, H.Y., Liu, S., Ni, X., Wu, M., Avrutin, V., Izyumskaya, N., Özgür, Ü., and Morkoç, H., Phys. Stat. Sol. (a), 207, 1993 (2010).
6. Liu, H.Y., Avrutin, V., Izyumskaya, N., Reshchikov, M.A., Özgür, Ü., and Morkoç, H., MRS (2009) DOI: 10.1557/PROC-1201-H05-20.

Keywords

Effect of Growth Conditions on Electronic and Structural Properties of GZO Films Grown by Plasma-enhanced Molecular Beam Epitaxy on p-GaN(0001)/Sapphire Templates

  • H.Y. Liu (a1), V. Avrutin (a1), N. Izyumskaya (a1), M.A. Reshchikov (a2), S. Wolgast (a3), C. Kurdak (a3), A.B. Yankovich (a4), A. Kvit (a4), P. Voyles (a4), Ü. Özgür (a1) and H. Morkoç (a1) (a2)...

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