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Effect of Film Thickness and Substrate Surface Treatment on Substrate Deformation: DLC on MgO

Published online by Cambridge University Press:  15 February 2011

A. Strojny ,
E. T. Lilleodden ,
G. Wang ,
J. V. Sivertsen  and
W. W. Gerberich
A. Strojny
Affiliation:
Department of Chemical Engineering and Material Science, University of Minnesota, Minneapolis, MN 55455.
E. T. Lilleodden
Affiliation:
Department of Chemical Engineering and Material Science, University of Minnesota, Minneapolis, MN 55455.
G. Wang
Affiliation:
Department of Chemical Engineering and Material Science, University of Minnesota, Minneapolis, MN 55455.
J. V. Sivertsen
Affiliation:
Department of Chemical Engineering and Material Science, University of Minnesota, Minneapolis, MN 55455.
W. W. Gerberich
Affiliation:
Department of Chemical Engineering and Material Science, University of Minnesota, Minneapolis, MN 55455.
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Abstract

Diamond-Like Carbon films with thicknesses controlled in the 10 to 100 nm range were sputter-deposited on single crystals of MgO. The substrates were prepared with varying roughness from 5 to 50 nm and varying surface dislocation densities from 100 to 2000 disl./μ2. Mechanical properties of the film and film-substrate interactions were investigated with an atomic force microscope retrofitted with a diamond indenter.

The load bearing capacity of the substrate increased with increasing film thickness. As the indenter approached the film-substrate interface, load excursions occurred for the thinner films. No excursion was found for the thick film. Load excursions may be attributed to dislocations nucleating at the interface and/or film delamination.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 281
Copyright
Copyright © Materials Research Society 1997

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