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The Effect of Damage Density Profile on Moving specles in Ion-Induced Reactions

  • K. Tao (a1), C. A. Hewett (a1), S. S. Lau (a1), Ch. Buchal (a2) and D. B. Poker (a2)...

Abstract

We present evidence in this study that the moving species under ion mixing conditions are affected by the implantation damage distribution in the sample. This observation holds for metal-semiconductor, metal-metal and semiconductorsemiconductor systems. The direction of thermal annealing and atomic transport appears to play a role in ion-mixing as well. When these two factors are in the same direction, only one dominant moving species is observed. When these two factors are in opposite directions, both constituents can contribute to the atomic transport in ion mixing.

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1. Pai, C. S., Lau, S. S., Poker, D. B., and Hung, L. S., J. Appl. Phys., 58(1985) 4172.
2. Pai, C.S., Lau, S.S., Poker, D.B., and Hung, L.S., J. Appl. Phys., 58(1985) 4178.
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10 Rehn, L.E. and Okamoto, P. R. in Phase Transformations During Irradiation (ed. Nolti, F.V., Applied Science), London (1983) p. 250.
11. Rehn, L. E. and Okamoto, P.R. in Phase Transformations During Irradiation (ed. Nolti, F.V., Applied Science, London (1983) p. 260.
12. Tao, K., Hewett, C. A., Lau, S. S., Buchal, Ch., and Poker, D.B., accepted for publication in Nucl. Instrum. and Meth. (1986).

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