Skip to main content Accessibility help
×
Home

The Effect of Channel Recess and Passivation on 4H-SiC MESFETs

  • Ho-Young Cha (a1), Christopher I. Thomas (a1), Goutam Koley (a1), Lester F. Eastman (a1) and Michael G. Spencer (a1)...

Abstract

Channel-recessed 4H-SiC MESFETs were fabricated and demonstrated excellent small signal characteristics. A saturated current of 250 − 270 mA/mm at Vgs = 0 V and a maximum transconductance of 40 − 45 mS/mm were measured for channel-recessed devices with a gate length of 0.45 m. The three-terminal breakdown voltages (Vds) range from 120 V to 150 V. The Ft and Fmax of the 2 × 200 m devices were measured to be 14.5 GHz and 40 GHz, respectively. The channel recess technique results in a lower saturation current but higher breakdown voltage which makes it possible for the devices to operate at high voltages. Si3N4 passivation suppresses the instability in DC characteristics and improves CW power performance by reducing the surface effects. Less dispersion in the drain current during a power sweep was observed after passivation.

Copyright

References

Hide All
1. Sriram, S., Augustine, G., Burk, A. A., Glass, R. C., Hobgood, H. M., Orphanos, P. A., Rowland, L. B., Smith, T. J., Brandt, C. D., Driver, M. C., and Hopkins, R. H., Electron Device Lett., vol. 17, 369371 (1996).
2. Binari, S. C., Klein, P. B., and Kazior, T. E., IEEE MTT-S, 823–1826 (2002).
3. Allen, S., Alcorn, T., Hagleitner, H., Henning, J., Janke, C., Ring, Z., Sriram, S., Ward, A., Wieber, K., and Palmour, J., presented at the ECSCRM 2002, Stockholm, Sweden (2002).

Related content

Powered by UNSILO

The Effect of Channel Recess and Passivation on 4H-SiC MESFETs

  • Ho-Young Cha (a1), Christopher I. Thomas (a1), Goutam Koley (a1), Lester F. Eastman (a1) and Michael G. Spencer (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.