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The Edge Delamination Test: Measuring the Critical Adhesion Energy of Thin-Film Coatings, Part II: Mode Mixity & Application

Published online by Cambridge University Press:  22 February 2011

Edward O. Shaffer II ,
Scott A. Sikorski  and
Frederick J. McGarry
Edward O. Shaffer II
Affiliation:
Department of Materials Science and EngineeringMassachusetts Institute of TechnologyCambridge, MA 02139
Scott A. Sikorski
Affiliation:
Department of Materials Science and EngineeringMassachusetts Institute of TechnologyCambridge, MA 02139
Frederick J. McGarry
Affiliation:
Department of Materials Science and EngineeringMassachusetts Institute of TechnologyCambridge, MA 02139
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Abstract

The edge delamination test (EDT) is being developed to measure the critical energy required to cause a thin film, under biaxial tensile stress, to debond from a rigid substrate[1]. The test uses circular features etched through biaxially stressed films adhered to a rigid substrate. If the stress is large enough, a stable debond ring grows radially about the feature. We use a finite element analysis to model the test, solving for the applied strain energy release rate as a function of crack length, feature hole radius and other geometrical parameters. The model identifies both mode I and mode II components of the strain energy release rate, and agrees with previous analytical solutions for the total debond energy. However, the model predicts, with a very refined mesh at the crack tip, the fracture process is pure mode I. To explore this result, critical strain energy release rates from the EDT and the island blister test (IBT) are compared. This agreement supports the model prediction that the failure process in the EDT is modeI peeling.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 338: Symposium – Materials Reliability in Microelectronics IV , 1994 , 541
Copyright
Copyright © Materials Research Society 1994

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References

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