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Dynamical X-ray Rocking curve Simulations of InGaAsP/InP Double Heterostruciures using Abeles' Matrix Method

  • A. T. Macrander (a1), B. M. Glasgow (a1), E. R. Minami (a1), R. F. Karlicek (a1), D. L. Mitcham (a1), V. G. Riggs (a1), D. W. Berreman (a1) and W. D. Johnston (a1)...

Abstract

Simulated rocking curves for a light-emitting diode structure are presented. Results for a structure containing uniform layers are compared to rocking curve data for a wafer grown by vapor phase epitaxy (VPE), and we conclude from the comparison that the VPE wafer closely approached the hypothetical ideal assumed in the simulations. Simulations illustrating difficulties in analyses and the effects of a graded active layer are also presented.

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References

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Saul, R. H., Lee, T. P., and Burrus, C. A., “Light-Emitting-Diode device design”, Chap. 5 in Semiconductors and Semimetals, Vol.22 ed. by Willardson, R. K. and Beer, A. C. (Academic Press, New York, NY).
[2] Macrander, A. T. and Strege, K., “X-ray monitoring of InGaAs layers grown by VPE”, MRS Symp. Proc. 56, 115 (1986).
[3] Macrander, A. T., Minami, E. R., and Berreman, D. W., “Dynamical x-ray rocking curve simulations of nonuniform InGaAs and lnGaAsP using Abeles' matrix method”, J. Appl. Phys. 60, 1364 (1986).
[4] Growth on 2 inch diameter rounds was performed in a reactor designed by Karlicek, R. F. with contributions by W. D. Johnston, Jr. and K. Strege.
[5] Cole, H. and Stemple, N. P., “Effect of crystal perfection and polarity on absorption edges seen in Bragg diffraction”, J. Appl. Phys. 33, 2227 (1962).
[6] Macrander, A. T. and Strege, K., “X-ray double crystal characterization of highly perfect InGaAs/InP grown by VPE”, J. AppI. Phys. 59, 442 (1986).
[7] Macrander, A. T., Bonner, W. A., and Monberg, E. M., “An evaluation of (100) sulfur doped InP for used as a first crystal in a x-ray double crystal diffractometer”, Materials Lett. 4, 181 (1986).
[8] Nahory, R. E., Pollack, M. A., Johnston, W. D. Jr., and Barns, R. L., “Band gap versus composition and demonstration of Vegard's law for In1−x GayP1−y lattice matched to InP”, Appl. Phys. Lett. 33, 659 (1978).

Dynamical X-ray Rocking curve Simulations of InGaAsP/InP Double Heterostruciures using Abeles' Matrix Method

  • A. T. Macrander (a1), B. M. Glasgow (a1), E. R. Minami (a1), R. F. Karlicek (a1), D. L. Mitcham (a1), V. G. Riggs (a1), D. W. Berreman (a1) and W. D. Johnston (a1)...

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